bro5539-01Indus-eng-Digital-2021-Final

Flow, Pressure & Vapor
Instrumentation

Mass Flow & Pressure Controllers

NEW

SLA Series Elastomer Sealed Metal Sealed Thermal MFCs GP200 Series Quantim® Coriolis MFCs
Pressure Controllers Metal Sealed P-MFCs
Ultra-fast response time and Most accurate measurement
Eliminate droop, boost and high-purity all-metal flow path Our most advanced MFC, and control technology for
hysteresis through closed minimizes contamination, GP200 is the first fully pressure very low flow applications.
loop control utilizing the core enhances yield. insensitive P-MFC with a unique
technology in our thermal MFCs. design approach enabling the
ultimate precision process gas
delivery over the widest range of
operating conditions.

Key Features • For processes sensitive • One true differential pressure • True mass flow measurement,
to moisture or oxygen sensor delivers superior not inferred
• Use with SLA Series mass flow flow measurement accuracy
devices to maximize process • Ultra-stable, highly accurate and repeatability reducing • Inherent fluid densitometer
consistency benefits measurement sensors measurement uncertainty
• Selectable multi-variable outputs
• Wide pressure measurement and • Fast precision control valves • Laminar flow element designed for of mass flow or volume flow and
control range low pressure drop making GP200 a density or temperature
• High-integrity (leak tight), universal P-MFC solution suitable
• Downstream or upstream ultra-high purity, all-metal for all pressures, all gases and all • Insensitive to fluid type
control modes wetted flow path processes.
• Variety of enclosure options —
• Durable, robust metal • Corrosion-resistant • Embedded MultiFlo™ gas model up to NEMA 4X/IP66
top lid prevents damage Hastelloy® sensor enables on-the-fly gas & range
during installation reconfiguration for maximum • High pressure capability for
• MultiFlo™ programmable gas process flexibility demanding research applications
• Independent and easily accessible and range capabilities
diagnostic/service port • Zero leak-by control valve delivers • Optional hazardous area approvals
• Real-time flow error detection 100x improvement in valve for Zone 2 and Class 1 Division 2
• SLAMf Series available with and pressure transient shut-down (optional)
NEMA4X/IP66 rated hardened insensitive technology • Internal and user settable alarms
enclosure for hose-down/ • Communication protocols: and diagnostics
wash-down applications DeviceNet™, EtherCAT®
and RS485

Performance • Fluid Type — gas • Fluid Type – gas • Fluid Type — gas and liquids

• Pressure Control Range — • Flow Range — 3 sccm – 300 slm • Flow Range – 3 sccm – 50,000 sccm • Flow Range — 1–27,000+ gm/hr
o Standard: 20 to 1 up to 1500 psi
(100 bar) • Accuracy — ±1% of SP • Accuracy - ±1% of SP (5-100% FS) • Accuracy — 0.2–0.5% of rate
o Optional: Up to 4500 psi (310 bar)
• Max Pressure — Up to 500 psia • Max Pressure – Up to 60 psia (4 bar) • Max Pressure —
• Flow Range — 3 sccm – 50 lpm (34.4 bar) o Standard 500 psi (34 bar)
• Accuracies — • Temperature Range – 10-60° C o Optional 1500 (103 bar) or 4500
• Temperature Range — 5–65°C (50-140° F) psi (310 bar)
o ±0.25% of Transducer FS (40 -149˚F)
(FS >300 psia) • Temperature Range — 0–60°C
(33-140°F)
o ±0.12% of Transducer FS
(FS <300 psia)

• Max Pressure — 4500 psia (310 bar)

Mass Flow & Pressure Controllers

SLA Series GF40 Series 5850E & i Series SLAMf Series
General Purpose Thermal MFCs MultiFloTM Thermal MFCs Analog Thermal MFCs NEMA 4X/IP66 Thermal MFCs

Proven MFC for widest range of Multiple gases and flows in Extremely reliable, accurate Delivers the precise accuracy
mass flow needs and applications one device maximizes process and repeatable measurement and long-term stability of our
delivers superior results and lower flexibility and productivity while and control for demanding proven SLA5800 but with a
total cost of ownership. preserving accuracy, all in a industrial processes. specially engineered NEMA 4X/
compact footprint. IP66 hardened enclosure for the
harshest environments.

Key Features • MultiFlo™ technology enables one • Wide flow and pressure ranges • NEMA 4X/IP66 hardened
MFC to support thousands of gas enclosure for hose-down/
• Superior long-term drift stability types and range combinations • Fast flow response to command wash-down applications
and the best MTBF in the industry without removing it from the gas changes with negligible overshoot/
line or compromising on accuracy undershoot • Hazardous area approvals: ATEX,
• Industry-leading device linearity, CE, IECEx, KOSHA, UL (listed)
repeatability and reproducibility • Excellent process gas accuracy • Analog only inputs/outputs enable Class 1 Division 2 & Zone 2
easy installation and serviceability
• Wide flow and pressure ranges • Suitable for a full suite of gases • Wide range of flows, temperatures
and pressures
• Programmable gas and range
capabilities • Programmable gas and range
capabilities
• Independent and easily accessible
service port simplifies installation, • Use with SLA Series pressure
diagnostics and troubleshooting controllers to eliminate droop,
boost and hysteresis
• Use with SLA Series pressure
controllers to eliminate droop, • New options packages designed
boost and hysteresis for biotech applications

• New options packages designed • Broad array of communication
for biotech applications protocols available including
EtherNet/IP™ and PROFINET®

Performance • Fluid Type — gas • Fluid Type — gas • Fluid Type — gas

• Fluid Type — gas • Flow Range — 3 sccm – 50 slpm • Flow Range — 3 sccm – 1000 lpm • Flow Range — 3 sccm – 2500 lpm

• Flow Range — 3 sccm – 2500 lpm • Accuracy — ±1% of SP (35-100% • Accuracy — ±1% FS • Accuracy — ±0.6% of SP
FS) (20-100% FS) available with 17025
• Accuracy — ±0.6% of SP • Max Pressure — 1500 psig certified devices
(20-100% FS) available with 17025 • Max Pressure — 150 psig (10 bar) (100 bar)
certified devices • Max Pressure —
• Temperature Range — 5–50°C • Temperature Range — 5–65°C o Standard 1500 psi (100 bar)
• Max Pressure — (41-122°F) (41-149°F) o Optional 4500 psi (310 bar)
o Standard 1500 psi (100 bar)
o Optional 4500 psi (310 bar) • Temperature Range — -14-65°C
(7-149°F)
• Temperature Range — -14-65°C
(7-149°F)

Variable Area Flow Meters

NEW

Acrylic Sho-Rate™ Series GT1600 Series MT3750 Series
VA Flow Meters Glass Tube VA Flow Meters Glass Tube VA Flow Meters Metal Tube VA Flow Meters

Most cost-effective variable Simple, rugged design for Simple, rugged design for Reliable, durable, low
area flow measurement long-lasting performance with long-lasting performance with flow measurement for
solution for non-corrosive and low and high-flow gas and liquid low and high-flow gas and liquid long-lasting performance
low-pressure applications. applications where viewing the applications where viewing the in harsh environments.
process is important. process is important.

Key Features • Rugged, single piece • Configurable to retro-fit GT1000, • For use in low flow applications
frame construction GT1300 and Full-View Series with high-pressure or
• Machined acrylic and molded hazardous fluids
polycarbonate bodies • Easy-change design allows • Premium materials of construction
quick interchangeability of ensure safety, indoor and outdoor • Compact design
• Annealed, unibody construction tube assemblies durability
eliminates leaks and panel • 4–20 mA output
detachment issues • Rotating lens provides 180° • Process connections can be
view with magnification ideal rotated 360°, 180° viewing window, • Good upgrade from glass
• Easy-to-read scales available in for panel mounting panel mount option tube flow meters
both standard and custom scaling
• Optional needle valves and flow • Transparent scale for easy • Optional alarms, transmitters
• Multiple valve fitting, o-ring controllers mounted to inlet or readability; also acts as a shield for and limit switch controllers
and float options outlet for precision flow control absolute safety provide added levels of
measurement and control
• Standard direct read scales • Monitor critical flow conditions
on tube for all fluids and fluid with alarm option (purchase at time
conditions of order or add it in the field)

• Standard millimeter scales with • Optional integral inlet or outlet
flow curves for all fluids and valve saves space, time & cost,
fluid conditions eliminating potential leak points

Performance • Fluid Types — clean liquids • Fluid Types — clean liquids • Fluid Types — clean liquids, gases
and gases and gases and steam
• Fluid Types — gas and liquids
• Flow Range — • Flow Range — • Flow Range — • Flow Range —
o Air: Up to 15 scfm / 425 slpm o Air: Up to 150 scfm/270 m3n/hr o Air: Up to 110 scfh / 3.1 m3n/hr
o Gas: 0.04 – 4,000 slpm o Water: Up to 5 gpm / 19 lpm o Water: Up to 26 gpm / 100 l/h
o Liquid: 0.01 – 75 lpm o Water: Up to 21 gpm/4,800 l/h
• Accuracy — ±3, ±5, ±10% FS • Accuracy — ±3, ±5% FS
• Accuracy — 2–10% FS • Accuracy — ±2, ±5, ±10% FS Class o Class 2.5, 4.0 VDI
• Max Pressure — 100 psig (7 bar) • Max Pressure — 200 psig 2.5 acc VDI/VDE (Optional ±1% FS,
• Temperature Range — (13.8 bar) Class 1.6 acc VDI/VDE) • Max Pressure —
o Standard 1500 psig (100 bar)
Up to 65°C (149°F) • Temperature Range — 1–121°C • Max Pressure — 500 psig o Optional 4000 psig (276 bar)
(33-250°F) (34.5 bar)
• Temperature Range —
• Temperature Range — 1–121°C -50–204°C (-58-400°F)
(33-250°F)

Pressure Products

MT3809 Series 8600 Series Mechanical Mechanical Pressure Gauges, SolidSense II®
Metal Tube VA Flow Meters Pressure Regulators Switches & Transmitters Pressure Transducers

Widest temperature, pressure High precision supply pressure Exceptional versatility and Smart, precise digital
and flow ranges for measuring regulators are direct-acting, reliability combined with measurement through
fluids in hazardous, remote areas. non-relieving units providing durable designs and materials dependable pressure monitoring
bubble-tight shut-off on to handle a wide range of in ultra-high purity and specialty
helium at 100 psi, ideal for industrial processes. gas applications.
analytical systems.

Key Features • Compact design • 2-inch stainless steel solid-state • Weld-free, corrosion-
switch and transmitter resistant materials
• Repeatable flow measurement • Suitable for line or panel mounting
even at low process temperatures • Adjustable pressure switch set • Outstanding zero stability and
down to -198°C (-325°F) and high • Pressure gauge connection point to operate lights or relays accuracy within 0.25% FS
process temperatures up to 420°C
(788°F) • Replaceable stainless steel inlet • Multiple process connections • Models available with integrated
filter element and socket orientations display or full-function
• Designed for high process programmable display
pressures 1379 bar / 20,000 psig • UL listed • 316L steel withstands
harsh environments • Digital thermal compensation
• 4–20 mA output with HART uses multi-point temperature-
• Welded in oxygen-free chambers compensation method
• Integrated FOUNDATION Fieldbus to meet rigid cleanliness and
safety guidelines of demanding • Proprietary micro-machined
• Optional local operator interface high-purity applications silicon strain gauges exhibit
with LCD screen very low zero drift

• Alarm functions meet
SIL 2 requirements

• Multiple corrosion-resistant
wetted materials and indicator
housings available

Performance • Ideal for use up to 1,000 sccm air • Pressure Range — Up to 4000 psi • Pressure Range —
(276 bar) -15–3000 psi (205 bar)
• Fluid Types — clean liquids, gases • Max Inlet Supply Pressure —
and steam 250 psig (17 bar) • Accuracy — 1% FS • Accuracy — 1% FS

• Flow Range — • Max Working Temperature — • Switches available with logic • Output Type — Analog voltage
o Air: Up to 750 scfm / 1200 m3n/hr o Standard 60°C outputs: or current
o Water: Up to 440 gpm /100,000 l/h o Optional 177°C o Off-on and Type 1 (0 to 9–30
Vdc) • Certifications/Approvals —
• Accuracy — ±1, ±2%, ±3%, ±5% FS • Total Pressure Drop — CE, FM and ATEX
o Class 1.6, 2.5, 4.0 VDI o Min 10 psi (0.7 bar) o Type 2 (8 to 30 Vdc) and
o Max 250 psi (17 bar)
• Max Pressure — o Type 3 (0 to 5 Vdc)
o Standard 6000 psig (413.7 bar)
o Optional 20,000 psig (1379 bar) • Transmitters available with
industry standard outputs — 4–20
• Temperature Range — mA; 0–5 Vdc; 1–5 Vdc
-198–420°C (-325-788°F)

Secondary Electronics & Software

0250 Series Power Supply, 0260 Power Supply, Smart BEST Software MultiFlo™
Readout & Set Point Controller Interface & Controller Configurator Software
The Brooks Expert Support
Compact, innovative, reliable Microsoft® Windows® based Tool™ (BEST) provides expanded MultiFlo™ Configurator software
microcomputer-based controller software application that provides control, diagnostics and servicing provides users with a fast and
provides power for up to four expanded control and monitoring capabilities for all versions of the simple method to reprogram
Brooks Instrument thermal mass capabilities in laboratory and SLA mass flow, SLA pressure, GF40 the gas and range on MultiFlo™
flow, Quantim Coriolis mass flow research environments. Together mass flow and QMB Quantim™ enabled GF100 Series, GF40
and/or pressure devices. with the power supply and coriolis mass flow products. Series, GF80 Series and Celerity/
RS485 to USB hardware module Unit brand mass flow controllers
this product provides a great without removing them from
turnkey solution for monitoring the gas line or compromising
and controlling up to 30 RS485 on accuracy.
S-Protocol mass flow and/or
pressure control devices.

Key Features • Control up to 30 RS485 • Easy plug-and-play installation via • Provides the same performance
S-Protocol mass flow and/or computer's serial or USB port as an MFC calibrated at the
• Self-diagnostics on every pressure control devices factory and tuned for a specific
power-up • User-friendly interface running gas and range
• Batch control for single- or under Microsoft® Windows®
• Batch control for single- or multi-channel batch recipes simplifies operation and data • Easy plug-and-play installation
multi-channel recipes capture. via computer's serial or USB port
• Save and reuse flow process
• Blending supports master slave and blending recipes for any • Able to switch control of the mass • Library with thousands of gas
configuration and operation network device flow device between BEST and types provides widest process
the external process controller for gas coverage
• Gas factor scaling adapts to any • Select gas page, change flow units real-time on-line diagnostics and
non-calibrated fluid and configure alarms tuning. • Allows for considerable reduction
of MFC inventory
• Valve Override Control — • Valve Override Control — • Able to capture device log data to
open, closed or normal open, closed or normal text file. • The MG-MR Configurator
software runs on PCs with
• Large, graphic eight-line backlit • Diagnostic monitoring for alarms, Windows 98SE/2000/NT4.0/or
display valve drive and device temperature Windows 7

• Smart DDE Software simplifies data • Data logging to track process
exchange with programs such as results or troubleshooting
Excel, Test Point™ and LabVIEW™

Performance • Power Input — 85–250 Vac, • BEST can be used for installation, • Ability to re-scale device with no
47–63 Hz start-up and servicing tasks impact on accuracy, turndown
• Power Input — Voltage: 12–24 Vdc that include device and or leak-by specifications, for
required, -15 Vdc permitted • Power Output — Voltage: diagnostic setup, configuration, optimum process and inventory
o Current: 400 mA max current 24 Vdc (± 10%) troubleshooting and tuning flexibility
draw per channel o Current: 3.5 Amp
o Instrument power draw: 0.8 Watts o Will power up to 10 Brooks S-Series • BEST Professional version also • Mass flow controllers can be
or SLA Smart II or 4800 Series mass provides access to the calibration reconfigured in a few minutes
• Optional power module: 100–240 flow/pressure devices parameters for SLA mass flow giving the user maximum uptime
Vac, 47–63 Hz and pressure products (Requires for a production process or
• Signal Input / Output — RS485 license subscription) maximum flexibility for research
• Power Output — +15V/2.0A, S-Protocol (HART Command Set) applications
-15V/1.0A or 12–24 Vdc/2.0A • To connect the computer to the
• Mounting Options — table top device an RS232 to RS485 or USB • Supports configuration of multiple
• Signal Input / Output — 0(1)–5 to RS485 converter and a 2.5-mm gas pages on one device enabling
Volts, 0(2)–10 Volts, 0(4)–20 mA jack plug to 9-pin sub-D connector dynamic gas page switching
cable is required providing process flexibility and
• Mounting Options — panel, table potential system cost reduction
top or rack mount

Communication Protocols

Nodes Unlimited Unlimited 65.535 RS-485 64 240 15 16
Baud Rates
127
Message Size
Main Topology 10 Mbps, 100 Mbps, 100 M 1.200 – 115K 31,25 K 125 K, 1.200 – 12 M 1.200
Message Types 100 Mbps, 1 Gbps 1.500 24 240 250 K, 500 K
1 Gbps
Cabling 1.440 8 244 31 Bytes
511

Standard Proprietary Predefined 2-Wire
Ethernet-cabel Wiring Cable sets (4 – 20 mA)

Star, Linear Ring Multi-Drop Multi-Drop Multi- Multi-Drop Multi-
or ring Drop with
Drop with Branches
Protocol commands,
web-­based Interface, Brooks Branches Brooks
Expert Expert
Support Tool (BEST) Protocol Communications, Brooks Expert Support Tool (BEST) Support
Tool (BEST)

KEY ADVANTAGES: Exceptional performance, flexible topologies, full duplex,
self-terminating, easy to deploy, uses standard, cost-effective
RS-485 Ethernet cabling

* PROFINET does not support ring topologies Widely used and field proven industry standards communication
protocols, well suited for medium and large automation projects,
cost-effective versus point-to-point solutions

Widely accepted, ideal for set-up, diagnostics and troubleshooting,
easy implementation over 4-20 mA signal lines, easy to use with HART
hand held communicator, can be used effectively over long distances
and in electrically noisy environments

Good for small automation projects or systems, supports typical
topologies used in small systems, custom tools and software (DDE,
DLL, 0260 Smart Interface), simplifies installation

Service and Support

Veenendaal, The Netherlands Dresden, Germany
+31 318 549 300 +49 (0) 351 2152 0417

Fremont, CA Global Székesfehérvár, Hungary Tianjin, China Seoul, Korea
(510) 440-1139 Headquarters +011 36 (22) 539 604 +86 (21) 5079 8828 +82 (31) 708 2562
Hatield, PA
Austin, TX (888) 554-3569 Shanghai, China Tokyo, Japan
(972) 839-3294 +86 139 1871 9630 +81 3 5633 7100

Mumbai, India Taipei, Taiwan
+91 (22) 6627 0780 +886 (02) 2719-9358

● Manufacturing
● Service Centers
● Application Support & Sales

Global Service and Support

Brooks Instrument products are recognized as the most
stable and reliable in the world. To keep your products
operating at the highest level of accuracy and extend
their life, your best choice is to trust Brooks Instrument
Factory Certified Service repair and recalibration offerings.

Only Brooks Instrument Factory Certified Service ensures that your Brooks Instrument
flow, pressure, vapor and vacuum products are serviced utilizing the same metrology
standards, work instructions, equipment and custom software as our manufacturing
processes — by expert technicians trained exclusively on servicing Brooks products.

Our global service center network offers fast turnaround on repair and
recalibration requests.

All specifications are subject to change without notice.
Brooks is a trademark of Brooks Instrument, LLC.
All other trademarks are the property of their respective owners.

SP-610-Ind, 4-21 © 2021 Brooks Instrument, LLC. All rights reserved.