SBSI Industrial Brochure 2021

Manufacturing
Instrumentation
and Controls, and Meters

Providing innovative solutions for the measuring and controlling
flow of gas and liquids of the manufacturing processes in the
pharmaceutical, food & beverage industries.

Featuring products from our main supplier

Gas Mass Flow Controller
Meter
Power Supply
Controller

Mass Flow Controller / Meter

To measure & control, or read flow rate of gas

sec-n100 s48 s600

Flow Range 10sccm - 1000 slm Specs 10sccm - 200 slm
Communication Analog / Digital Digital
Power Supply ± 15V or ± 24V 10sccm - 200 slm ± 24V
All Analog All
Gas Type
± 15V or ± 24V
All

Mass Flow Controller

To measure & control flow rate of gas

sec-E40 MF-c

Specs

Flow Range 10sccm - 200 slm 10sccm - 100 slm
Communication Analog Analog
Power Supply ± 15V ± 24V
All
Gas Type Non-reactive Gas

Flow Meter Multifunctional Software

To read flow rate of gas To check MFC condition, change gas type and flow rate,
yearly calibration, etc.

MF-F; SEF Software

Flow Range Specs
Power Supply
0 - 1000 slm
Gas Type ± 24V

Non-reactive Gas

Quick-Result Checker High-Accurate Flow Meter

(Portable checker) To check MFC condition onsite To check, inspect & calibrate flow rate of any flow-meter
product

MFT-20 Flow Range SF/VP
Gas Type
Specs Specs

1. Simplifies the checking procedure VP-1U: 0.2 - 10 mL/min
(no need to remove the piping) VP-2U: 2 - 100 mL/min
VP-3U: 20 - 1000 mL/min
2. No need for a power supply (operates VP-4U: 0.2 - 10 L/min
on power from the existing signal N2, O2, Air, Ar, CH4, etc.
cable)

3. Capable of fully opening and closing
the valve

4. Automatic zero function available
(only for SECs equipped with an
automatic zero function)

Power Hub Basic Controller

To supply power and control flow rate of max 8 Mass Flow To supply power and control flow rate of Mass Flow
Controller / Meter Controller / Meter

xPH-100 PE-S7; PE-D10/D20

Communication Specs Communication Specs
Power Supply Power Supply
Analog & Digital Analog
100 / 240 VAC 100 / 240 VAC

Power Source Unit

To supply power to max 6 Mass Flow Controller / Meter,
including other functions such as flow rate alarm, setpoint
input & output, etc.

Communication Specs
Power Supply
Analog (0 ÷ 5 VDC)
100 / 240 VAC

PE-10, 20, 30

Liquid Mass Flow Controller

Meter
Vaporizer

Liquid Mass Flow Controller Liquid Mass Flow Meter

To measure & control, or read flow rate of liquid To read flow rate of liquid

LV-F LF-F; XF-100

Flow Range Specs Flow Range Specs
Communication Communication
Power Supply 0.2 - 30 g/min Power Supply 0.2 - 30 g/min
Analog & Digital Analog & Digital
Liquid Type Liquid Type
± 15V ± 15V
All, except corrosive type All, except corrosive type

Liquid Flow Meter Carrier Gas Vaporizer

To read flow rate of liquid To vaporize / convert liquid to vapor / gas with gas blowing

LW; VL; LD MI-1000; MV-1000

Flow Range Specs FlowRange Specs
Communication Liquid Type
Power Supply 0.05 - 60 L/min Max 30g/min
Analog H2O2, H2O, O3, etc.
Liquid Type
± 24V or built-in battery
all, except corrosive type

Non-Carrier-Gas Vaporizer High-Flow Vaporizer

To directly vaporize / convert liquid to vapor / gas without To directly vaporize/ convert liquid to vapor / gas with high
gas blowing volume

Flow Range VC-1000 Flow Range LE
Liquid Type Liquid Type
Specs Specs

Max 30g/min Max 30g/min
H2O2, H2O, O3, etc. H2O2, H2O, O3, etc.

Pressure Regulator
and Valve

Pressure Regulator Pressure Valve

To measure & control pressure, apply for both blowing To adjust and create pressure
and sucking way

UR-Z700 PV-1000; PV-2000

Pressure Range Specs Flow Range Specs
Flow Range Communication
max 950 kPa Power Supply 1 - 20 SLM
Communication 1, 10, 50 LM Analog
Power Supply ± 15V
Analog & Digital
± 15V

Pressure Controller

To measure & control both pressure and flow rate at the
same time

GR-300

Pressure Range Specs
Flow Range
1-100 Torr
Communication 20, 50, 100 SCCM
Power Supply Analog & Digital

Gas ± 15V
He/ Ar/ N2

Process Analyzer
and Monitor

Plasma Emission Controller Interferometric Process Monitor

To detect end-point or control plasma condition in the To be applied in (Dry) Etch and (PE) CVD Process. To monitor
plasma-based semiconductor thin-film process End-point, Etch rate, Thickness, Fringe analysis and Process
development, etc.

EV-140C LEM-CT

Wavelength Range Specs Light Source Specs
Light Source
200 - 800 nm Wavelength Lase diode
Consult SBSI for more Spot Diameter 670 nm, 808 nm,
Standard 905 nm, 980 nm

20 - 100 um
Consult SBSI for more

Spectroscopy Process Monitor Residual Gas Analyzer

To be applied in Dry Etch and PECVD process. To monitor To measure & analyze residual gases in vacuum chamber
End-point, Fault detection, Chamber Health, Cleaning,
Plasma Monitoring & Process development, etc.

QL-SG

Standard EV 2.0 Measurement Specs
Range
Specs 2 - 65 AMU
Operating 2 - 100 AMU
200 - 1050 nm Pressure 4 - 300 AMU
Consult SBSI for more Communication max 0.9 Pa

Power Supply Analog
24 VDC

Vapor Concentration Monitor Gas Monitor

To measure & monitor vapor concentration To measure & monitor concentration of any gas. This product
is installed in-line on pipe

IR-300 IR-400

Measurement Specs Communication Specs
Concentration Range
Communication 0 TO 100% of Full Scale Analog & Digital
Analog & Digital Consult SBSI for more
Standard Main Unit: 15 VDC

Cell Heater: 200/240VAC

O3 / H2O2 / O2 Dissolved
Monitor

O3 Dissolved Monitor H2O2 Dissolved Monitor

To monitor and feedback concentration of O3 in To monitor and feedback concentration of H2O2 in
clean water solution clean water solution

HZ-960 HZ-960-HPO-M

4 Models Specs 4 Models Specs

Operating ZH-10: 0.00 - 10.00 mg/L Operating ZH-10HPO: 0 - 1000 ppm
Temperature ZH-40: 0.00 - 40.00 mg/L Temperature ZH-40HPO: 0 - 4000 ppm
ZH-100: 0.00 - 100.00 mg/L
ZH-500: 0.00 - 500.00 mg/L ZH-100HPO: 0 - 1.000%
ZH-500HPO: 0 - 5.000%
Max 80°C
Max 80°C

O2 Dissolved Monitor

To monitor and feedback concentration of O2 in
clean water solution

SD-300

Measurement Specs
Range
ZH-10: 0.00 - 10.00 mg/L
ZH-40: 0.00 - 40.00 mg/L
ZH-100: 0.00 - 100.00 mg/L
ZH-500: 0.00 - 500.00 mg/L

Special Conductivity Meter

Resistivity Meter
pH Meter

High Conductivity Meter

To measure conductivity value, especially highly applied for
special solution such as pure water, acid or base solution
which has either very low or very high conductivity value.
Additionally, sensor material is resistant / non-reactable to
the solution

HE-960HC; HE-480C-GC

Measurement Specs
Range
0 - 1000 mS/cm
Sensor Type Glass Carbon

High Resistivity Meter

To measure resistivity value, especially highly applied for
special solution such as pure water which has very high
resistivity value. Additionally, sensor material is resistant /
non-reactable to the solution

HE-960RW-GC; HE-960R-GC

Measurement Specs
Range
0 - 100 MΩ.cm
Sensor Type Glass Carbon

pH Meter - Auto Calibration

„To measure pH value with outstanding points as:
- Micro sampling of 500uL/sample or 30mL/hour.
- Automatic calibration & KCI supply
- Ultra-small glass electrode“

pH Measurement UP-100
Range
Specs
Temperature
Repeatability 0 - 14
20 - 60°C
± 0.1 pH

Chemical Concentration
Monitor (CS Monitor)

CS Monitor To measure chemical concentration.
For CS-600: max 6 chemicals
To measure chemical concentration, up to max 4 For CS-700: max 8 chemicals
chemicals once.

CS-100 CS-600; CS-700

Chemicals HF / HNO3, H2SO4 / HF, HF / Specs
Example EG, SC-1, SC-2, SPM, BHF, FPM,
Consult SBSI
Measurement TMAH / H2O2, HNO3 / CH- HORIBA owns cutting-edge
Range 3COOH / H3PO4, etc.
technology to customize
With/Without Cooling unit all customers‘ enquiries on
Consult SBSI for more
chemicals concentration
monitor

Chemical Concentration Monitor

To measure chemical concentration based on
conductivity value. This product is used as a
conductivity meter as well

HE-960H-KOH (KOH);
HE-960H-TM (TMAH);
HE-960CA (Citric Acid)

Measurement Specs
Range
HE-960H-KOH: 0-10%
HE-960H-TM: 0-10% or 0-3%
HE-960CA: 0-2% or 0-2000ppm

For other ranges: consult SBSI

HE-960-M (HF, HCL, NH3);
HE-960M-400 (HF);
HE-960H (HF, HCI);
HE-960EM/CM-520L

Measurement Specs
Range
HE-960-M HF: 0-5000ppm, HCL:
0-5000ppm,

NH3: 0-5000ppm

Conductivity 0-50.00/ 0-2.00mS/cm
HF-960H:HF: 0-10.00%, HCl: 0-10.00%

“20 years of innovating diagnostics solutions”

+63 (2) 8824-4551 www.sbsi.com.ph

6023 Sacred Heart cor. Kamagong Sts.,
Brgy. San Antonio, Makati City,
Metro Manila, Philippines 1203