membrane accumulation chamber is the          (1)  Q  =  ∆ PV
very long probe hose (up to 60 m or                       ∆t
200 ft) that may be used with little or no
loss in response time and no loss in test     If Q = leakage rate in mass flow units
sensitivity. This allows the operator to      (Pa·m3·s–1 or std cm3·s–1), V = volume of
place the helium mass spectrometer at         the test system (cubic foot), ∆P = change
one location near an entry hole and scan      in pressure (in. Hg) and ∆t = change in
the welds of the entire bottom from that      time (hour), then 3.8 = conversion factor
one location. The probe hose is so small      and Q = ∆PV/3.8∆t.
as to be virtually weightless, whereas a
halogen diode or electron capture                 As an example, if a tank were 30.5 m
instrument that weighs 5 to 10 kg (several    (100 ft) in diameter and the grating space
pounds) must be carried with the probe.       between the inner and outer bottoms
                                              were 13 mm (0.5 in.) and the grating
    A disadvantage is the added technical     occupied 20 percent of that space, the
training and experience needed to             volume of that space would be about V =
perform helium mass spectrometer              (50)2π (0.4)/12 ≅ 7.4 m3 (262 ft3).
detector probe leak testing versus what is
needed to perform halogen diode or                If this volume were evacuated to a
electron capture detector probe leak          negative gage pressure of 98 kPa
testing.                                      (736 torr), then held for 8 h and the
                                              vacuum gage reading had increased
    Another disadvantage of the helium        333 Pa (2.5 torr) in that time, then one of
mass spectrometer is the greater cost.        the following would be indicated.
Depending on the degree of
sophistication of the model purchased,         1. Real leakage Q = (0.1)(262)/(3.38)(8) =
the cost of the helium mass spectrometer           0.86 std cm3·s–1.
and associated equipment may cost
anywhere from three to six times more          2. Or system volume changes normally
than the best halogen diode or electron            because of the tendency of large flat
capture instruments.                               membranes to change shape with very
                                                   slight temperature changes.
    If a quantitative leak test of a double
bottom is required, then the welds outside     3. Or nothing significant is indicated
the tank shell between the inner and               because the pressure change is within
outer bottoms on double bottom designs             the gage’s listed accuracy of
must be leak location tested before the            0.33 percent of full scale. This is about
quantitative test. The fastest and most            the listed accuracy for such gages.
economical test technique is usually a
bubble pressure test.                             This is the first element of uncertainty
                                              when performing a quantitative pressure
Comparison of                                 rise measurement test of an aboveground
Quantitative Leak Testing                     storage tank with a double bottom. That is,
Techniques                                    does a small pressure increase during such
                                              a test reveal actual leakage or a false
Pressure rise measurement is one of the       indication of leakage? When this occurs,
quantitative leak test techniques that has    the test can be repeated or continued for a
been appearing quite frequently in many       longer time period in order to average
aboveground storage tank double bottom        down any errors. This may or may not
design specifications. After completion of    produce a more conclusive result, but in
required preliminary leak testing, the        any event it will cost more time and
specifications normally require that the      money.
space between the double bottoms be
partially evacuated to some pressure              If the conclusion is that this is real
below atmosphere and held at that             leakage, the second element of
pressure for a defined period of time         uncertainty becomes apparent — namely,
without any increase in the pressure (loss    where is the leakage? Is it in the outer
of vacuum). A typical requirement is to       bottom, in the inner bottom or in the
evacuate to a negative pressure (vacuum)      perimeter welds between the bottoms
of 98 kPa (14.2 lbf·in.–2 or 735 torr) below  outside the tank shell?
atmosphere and hold for 8 h without any
loss (degradation) of the vacuum. Another         To reach a conclusion, the only option
typical requirement is to evacuate to         is to retest the inner bottom and the
68 kPa (9.8 lbf·in.–2 or 508 torr) below      perimeter welds between the bottoms
atmosphere and hold for 24 h without          outside the tank shell by a leak location
any loss of the vacuum.                       technique. If leaks are detected in one or
                                              both of these areas, the leaks can be
    The basic pressure rise relationship is:  repaired, the hold test can be rerun and
                                              the results will most likely be satisfactory.
                                              If no leaks are detected in either of these
                                              areas, it would have to be assumed that
                                              the leakage was from the outer bottom.
                                                  Pressure loss measurement is a
                                              quantitative leak test technique that can
                                              be specified for a double bottom system.
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This technique should not be performed
                       with the tank empty. This is because of
                       the very small positive pressure
                       differential that a large flat membrane
                       bottom can tolerate before it balloons;
                       i.e., 600 to 750 Pa (63 to 76 mm H2O or
                       2.5 to 3 in. H2O) water pressure. Even a
                       slight variation in temperature will
                       change the pressure and make a sizable
                       change in the volume due to the
                       movement of the inner bottom. This will
                       produce test results impossible to
                       interpret.
                           When this technique is specified, it
                       should include the requirement that a
                       head of water must be in the tank during
                       the test. If a tank contains 3.7 m (12 ft) of
                       water, assuming an adequate foundation
                       under the outer bottom, the space
                       between the bottoms could then be
                       pressurized to 34 kPa (5 lbf·in.–2), without
                       any ballooning of the inner bottom. This
                       would also virtually eliminate temperature
                       as a variable for that space because the
                       water would be a large heat sink that
                       would keep the temperature of that space
                       stable. On completion of the test, the
                       drain or sampling pipes between the
                       bottoms can be checked for signs of
                       moisture. If the hold test fails, an
                       indication or lack of an indication of
                       moisture between bottoms would indicate
                       the source of the leakage.
                           Mass flow measurement is a
                       quantitative test technique that is not
                       usually specified by owners but that has
                       several decided advantages. First, it can be
                       performed at a pressure either above or
                       below atmospheric pressure; second, it
                       can be performed in a minute or two.
                       Limiting the time duration of the
                       measurement can eliminate temperature
                       as a test variable. If conducting this test
                       technique at a pressure above atmospheric
                       pressure, it is suggested that it be done
                       with water in the tank so that a pressure
                       of about 20 kPa (a few pounds per square
                       inch) can be used rather than only about
                       1 kPa (3 or 4 in. H2O). A disadvantage of
                       this test technique is that the mass flow
                       meter must be purchased for the specific
                       pressure level and anticipated potential
                       leakage rate range that would have to be
                       measured.
                                                                                                      Leak Testing of Petrochemical Storage Tanks 539
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PART 3. Determining Leakage Rate in
Petrochemical Structures
Sealed Volume Flow Meter                       pressure or with gage pressures of about
Leak Testing of Large                          300 Pa (1.25 in. water) in air or gas above
Pipelines and Systems                          the liquid petroleum product contained in
                                               the structure. These storage tanks are
The sealed volume flow meter leak testing      normally built and tested in accordance
technique can be used for leak testing of      with API 650 standards.5,16-18
pipelines and other large volume systems.
The pipeline segment to be leak tested is          Tanks such as those sketched in Fig. 12
plugged off at its ends. The isolated          are used to store crude oil, various grades
section is connected to a source of            of refined oils, jet engine fuels, kerosene,
pressurizing gas or air and equipped with      gasolines and other petroleum products.
a pressure regulator and a bubbler.            When constructed of corrosion resistant
Pressurized gas or air is injected through     materials, they are also used to store
the bubble to fill the pipeline segment or     acidic and caustic products. As single wall
large system under test. If the line or        low pressure structures with external
vessel is leak tight, the bubbling will        insulation, or as double wall structures
eventually cease when the pressure within      with the same configurations as cryogenic
the system is equal to the pressure applied    structures, they are used to store liquid
externally. If leakage exists, there will be   propane, liquid butane, anhydrous
no cessation of bubbling while the             ammonia and other low temperature
pressurizing source continues to inject gas    liquid products. They are normally built
or air to replace that lost by leakage in the  and tested in accordance with API 620,
system under test.                             Design and Construction of Large, Welded,
                                               Low·Pressure Storage Tanks.6
Flow Meter Leakage
Testing of Petrochemical                           To reduce vapor loss from fixed roof
Structures                                     tanks containing volatile products such as
                                               gasoline, several of these tanks containing
The flow measurement leak test technique       the same product are sometimes
finds applications in leak testing of large    manifolded to a variable volume structure
petrochemical structures. Flat bottomed        such as a lifter roof tank, vapor tank or
storage tanks are designed with column         vapor sphere such as those sketched in
supported or self-supporting fixed roofs,      Fig. 13. When properly sized, these
various types of floating roofs and            constant gage pressure structures maintain
combinations of fixed and floating roofs,      the pressure in the manifolded fixed roof
as sketched in Fig. 12. These structures       tanks at levels below the settings of the
normally operate with atmospheric              pressure relief vents and above the
                                               settings of the vacuum relief vents. Thus,
                                               they not only reduce loss of product
                                               vapor but also prevent the intake of
                                               oxygen laden atmospheric air, which can
                                               create explosive atmospheres above
                                               flammable products.
FIGURE 12. Petrochemical storage vessels with various roof designs.
 Column     Self-supporting
supported      fixed roof
fixed roof
                                                                     Fixed roof
                                               Floating
                                                 roof Seal                    Seal Floating
                                                                                              roof
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Leakage Requirements for                        performance data on a seal design or
Petrochemical Structures                        when the specifications for a floating roof
                                                tank require that the roof-to-shell seal
Functional and code leakage requirements        leakage rate be determined, it is usually
for petrochemical structures such as those      accomplished by the flow measurement
sketched in Fig. 12 and 13 are intended to      leakage test technique. When a customer
ensure that finished product tanks have         specification requires the determination
no liquid product leakage. For tanks that       of the total leakage rate of a variable
are to store volatile products that are         volume structure with a movable
flammable, toxic, acidic or caustic, no         diaphragm, the leak test is performed by a
vapor leakage is desirable. But for tanks       volume change leak testing technique.
such as those with floating roofs with
moving flexible seals, this is not a realistic  Techniques Used in Leak
functional requirement. For these types of      Testing of Typical
tanks the product vapor leakage must be         Petrochemical Structures
sufficiently limited so that it does not
create a toxic or flammable hazard in the       Preliminary leak testing of small critical
area around the structure and so that it        areas of weldments or assemblies in
minimizes product evaporation losses.           petrochemical structures uses bubble tests
These same requirements apply also to           performed by direct pressurization or
variable volume vapor storage tanks. The        vacuum box techniques. As an alternative
leak testing requirements of the API code       to bubble testing, leak testing with liquid
are normally adequate for these types of        tracers is performed either directly (using
structures. Any additional leak testing         capillarity of penetrants rather than
performed is normally done because of           pressure differentials) or with a pressure
customer specification or manufacturer          differential obtained with a vacuum box.
requirements.
                                                    A pressure drop orifice flow
Selection of Leak Testing                       measurement test technique is adequate
Technique for                                   for the accuracy required to determine the
Petrochemical Structures                        leakage rate of a floating roof-to-shell seal.
                                                The volume change technique, auxiliary
The leak testing performed on                   chamber displacement technique or
petrochemical structures such as those          auxiliary chamber accumulation flow
sketched in Fig. 12 and 13 is normally          meter technique may be used to
limited to the code required bubble             determine the total leakage rate of a
testing or solution film testing technique      variable volume petrochemical structure
and the through penetrant leak testing          with a movable diaphragm. These
technique. Past experience has shown            techniques are described next.
that the sensitivity of these two
techniques, when they are performed
properly, is adequate. When the
manufacturer of a floating roof storage
tank desires new or additional
FIGURE 13. Various designs of variable volume petrochemical storage vessels, including some
with diaphragms.
Lifter roof  Vapor tank                                                                                         Vapor sphere
Seal
                                                            Diaphragm
                                                                                                     Diaphragm
                                                                                                      Leak Testing of Petrochemical Storage Tanks 541
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Pressure Drop Orifice Test                    Leakage Rate Test of
for Leakage Rate of                           Variable Volume Vessel
Floating Roof Seal                            with Moving Diaphragm
Figure 14 shows schematically the             Figure 15 shows schematically the
technique for connecting a water              connections of a water manometer and a
manometer to the seal space between the       pressurizing line to a tank in preparation
tank shell and the outer rim plate of a       for a leakage rate test for determining the
floating roof of a petrochemical storage      total leakage rate of a variable volume
structure. Then the leakage rate of the       structure with a movable diaphragm.
floating roof seal can be determined by       Vessels of this type operate at a constant
the pressure drop orifice leak test           gage pressure except at the upper and
technique, after installing an orifice with   lower limits of diaphragm displacement.
a pressure regulator in a line to the seal    However, due to the very low operating
space. The pressure regulator is then         pressure of the diaphragm system,
adjusted until the orifice flow maintains     changes in barometric pressure cannot be
the seal space at the test pressure           ignored during the leakage test. Surface
specified.                                    thermometers are placed at various
                                              locations on the shell and the barometer
    The flow rate for the system orifice for  is placed in a sheltered area near the tank.
the pressure shown on the pressure
regulator is found by reference to the flow       With a roof fitting open to the
chart relating flow rate to pressure drop     atmosphere, air is injected into the tank
for the specific orifice being used. (The     below the diaphragm until the diaphragm
downstream pressure at the outlet of the      has been raised to a level near the middle
orifice can be ignored because it is          of its travel range. The water manometer
insignificant compared to the orifice inlet   measures this air pressure, relative to the
pressure.) The flow rate that is through      atmosphere (249 Pa = 1 in. H2O; 9.8 Pa =
the orifice and that just maintains the seal  1 mm H2O). However, it is necessary to
space pressure constant is a direct measure   obtain forecasted trends in ambient
of the total leakage rate of the seal. The    temperature for the test duration. If the
preceding steps can be repeated using         temperature trend is upward, start the
different sizes of orifice (to vary the air   leak test with the diaphragm in the lower
flow rate), if needed to increase the         half of its travel range. If the temperature
accuracy of the leakage rate test             is expected to fall, start the test with the
measurements.                                 diaphragm above the middle of its range.
    Other leak test techniques could be           At the start of the leak testing period,
used to determine the total leakage rate of   record the average, surface temperature
the seal of the floating roof in this         T1, the barometric pressure Pb1, and the
example. These include use of a               vessel gage pressure Pv1. Also, measure the
combination flow meter and orifice or use     height of the diaphragm at its center (see
of a low pressure flow meter and regulator    Fig. 15). Determine the initial measured
to control inflow to match the leakage of     volume Vm1. From these data, determine
the roof seal.                                the quantity P1V1 of gas (mass at standard
                                              temperature conditions of 20 °C or 70 °F)
                                              from the relation:
FIGURE 14. Arrangement of manometer and pressure drop orifice connections for leakage rate
test of the seal of a floating roof petrochemical storage structure.
       Flexible seal  Manometer               Regulator
                                                         Air
                      Orifice
Shell                                                         Floating roof
       Seal space
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( )(2)                        293
                PV   =  Vm Pv + Pb   T + 273             Auxiliary Chamber Leakage
                                                         Rate Test of Movable
           where PV is quantity of gas (Pa·m3); Vm is    Diaphragm in Variable
           measured volume estimated from tank           Volume Petrochemical
                                                         Structure
           capacity chart (cubic meter); Pv is pressure
           within vessel (pascal); Pb is measured        Figure 16 and 17 show schematically the
           barometric pressure (pascal); and T is        leak testing equipment arrangement used
                                                         for measuring leakage rates of a movable
           average temperature (degree celsius).         diaphragm in a variable volume storage
                                                         vessel, such as might be used in a
               At the end of the required leak testing   petrochemical industrial facility. In
                                                         preparation for this leak test, first remove
           period, record the same parameters as Pv2,    the pressure vacuum vent and blank this
           Pb2, T2 and Vm2 and again determine the       fitting (shown at top of sphere in Fig. 16).
           final mass P2V2 of gas, corrected to the      Then an automatic or manual relieving
           standard temperature (see Eg. 2). The         mechanism is connected to the tank, as
                                                         shown at the lower right of Fig. 16. A
           leakage rate in SI units is now given by:     water manometer and a pressurizing line
                                                         are next connected to the tank (as shown
           (3) Q = P1V1 − P2V2                           at bottom left and bottom right of
                                  t2 − t1                Fig. 16). Then, open a roof fitting to the
                                                         atmosphere to let air above the movable
           where t is time (second).                     diaphragm escape as pressure is applied
               In applications where English units and   beneath the diaphragm.
           fahrenheit temperatures are used and time     Pressurization and
           is measured in hours, the quantity of gas     Preliminary Leak Tests of
           at standard conditions is computed as:        Vessel Test Connections
           (4)  PV   =  Vm  Pv + Pb     530              The tank volume below the movable
                              14.7   T + 460             diaphragm is then pressurized as follows.
                                                         With the roof fitting still open to the
           where PV is quantity of gas (standard         atmosphere, add air to the tank until the
           cubic foot), Vm is measured volume            movable diaphragm rises to the top.
           estimated from tank capacity chart (cubic     Continue to add air until the tank is at
           foot), Pv is pressure within vessel           the required test pressure. Add air to the
           (lbf·in.–2 gage), Pb is barometric pressure   tank or release air from the tank as
           (lbf·in.–2 absolute), T is average            necessary to maintain this pressure at a
           temperature (degree fahrenheit) and t is      fixed level during the leakage rate test.
           time (hour).
                                                             After pressurization is completed, fill
               Again, it is necessary to determine the   the previously tested displacement
           initial quantity of gas V1 at the beginning   chamber with water through the inlet
           of the leak test and the final quantity       valve at the top of this chamber (see
           P2V2 of gas, at the end of the test by use    Fig. 17). Then close this inlet valve and
           of Eq. 4. The leakage rate in mixed           install hose or tubing from this valve on
           English units is then given by:               the displacement chamber to a roof
                                                         connection on the large tank. Next,
           (5) Q = P1V1 − P2V2                           pressurize the space above the tank
                                   t2 − t1               diaphragm through a valve connection on
                                                         the topmost access hole cover to provide a
           where t is time (hour).                       slight air pressure. Use bubble testing
                                                         solution to leak test the connections from
FIGURE 15. Arrangement for air injection and water       the tank roof through the hose or tubing
manometer connections for leakage rate test of variable  connecting the roof to the displacement
volume petrochemical vessel with moving diaphragm.       chamber, to the blanked vent and to the
                                                         access hole valve. Any leaks indicated
                                                Open     must be repaired and the connections
                                                         retested before proceeding further. Finally,
Diaphragm                                                open the access hole valve to release the
                                                         pressure above the diaphragm, then close
                                     Air                 the access valve and install a plug in it.
Manometer       Air
                                                                                                      Leak Testing of Petrochemical Storage Tanks 543
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FIGURE 16. Arrangement for auxiliary chamber displacement leakage rate test of the movable
diaphragm in a variable volume petrochemical storage tank. Overall view of spherical tank
and leak test equipment.
                                                                         Close
                                                Blank    Diaphragm
                                                         in full
                                                         position    Hose or tubing
                          Pressure/
                           vacuum
                                vent
  Diaphragm                                     Air
at beginning                                                                                Displacement chamber
        of test
              H2O                                        Air line                      Air supply
Manometer                                                H2O
                                                         Relieving device
FIGURE 17. Detailed drawing of design of displacement chamber shown at lower right in
Fig. 16.
                                                     Locate to suit
                   Valve
                                                         Sightglass
                                                             Scale
                                                                                       Overflow
                                                Locate
                                                to suit
                          To sightglass tube                              (side view)
                                  (front view)           To overflow tube
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Procedure for Auxiliary Chamber                 where Q is leakage (Pa·m3·s–1 at 20 °C), Pb
Displacement Leakage Rate Test                  and Pm are pressure (pascal), V is volume
of Tank                                         (cubic meter), T is temperature (degree
Following these preparations, the leakage       celsius) and t is time (second).
rate test for the tank system of Fig. 17
may be started. A surface thermometer is            If mixed English units are used, the
installed on top of the displacement
chamber and this chamber is shaded from         leakage rate Q is given at a standard
direct sunlight for the duration of the         pressure of 101 kPa (14.7 lbf·in.–2), a
leakage test. A barometer is placed near        standard temperature of 20 °C (70 °F) and
the displacement chamber to measure
changes in atmospheric pressure. The top        volume K1 (cubic centimeter) per unit of
end of the overflow tube is then adjusted       height H of water in the sight glass of the
to the same height as the water in the
displacement chamber sight glass. Then          displacement chamber:
the valve on the top of the displacement
chamber is opened. Start the leakage rate       (8)  Q  =  K1       Pb2       530
test just as the water begins to move.                         H2   14.7  T2 + 460
                                                               
    At the start of the test, record time t1,
surface temperature T1 of the                           −  H1  Pb1         530 
displacement chamber, barometric                               14.7                
pressure Pb and displacement chamber                                   T1  +  460  
sight glass water height H1. During the
leakage rate test, maintain the top end of              ( )÷ t 2 − t1
the overflow tube at the same height as
the height of the water by using the            If the initial water height H1 is equal to
pulley cable attached to the overflow           zero, this reduces to the form of:
tube. This is done in the displacement
chamber sight glass to prevent any                         K1 H 2   Pb2        530
pressure buildup in the displacement                                14.7   T2 + 460
chamber. At the end of the required leak        (9)  Q=
testing time, record the time t2, the                                t2 − t1
surface temperature T2 of the
displacement chamber, the barometric            Auxiliary Chamber
pressure Pb2 and the displacement               Accumulation Flow Meter
chamber sight glass water height H2. Note       Leak Test of Variable
the elapsed time t2 – t1 of test duration.      Volume Structure with
                                                Movable Diaphragm
Calculating Total Leakage Rate for
Leak Test Using Auxiliary Chamber               Figure 18 shows schematically the leak
                                                testing equipment arrangement used for
For the auxiliary chamber leakage rate test     measuring leakage rates of a variable
of the variable volume tank of Fig. 17, the     volume petrochemical storage vessel with
following relations are used:                   a movable diaphragm, using the auxiliary
                                                chamber accumulation flow meter
(6)  Q  =     KH  2  Pb2  T2  293              technique. Preliminary steps include
                             + 273            removing the pressure vacuum vent and
                                                connecting a water manometer to this top
        −  KH1 Pb1             293             fitting, connecting an automatic or
                           T1 + 273           manual pressure relieving mechanism to
                                                the tank and connecting a water
        ÷ (t2 − t1)                             manometer and a pressurizing line, all as
                                                shown in Fig. 18. Then, with a roof fitting
    In Eq. 6, the SI units are those listed     open to the atmosphere, air is added to
previously under Eqs. 2 and 3 with the          the tank until the movable diaphragm is
addition of the height H of the water and       at the top. Additional air is injected into
K equal to the volume (cubic meter) per         the tank until its pressure is equal to the
unit of height of water in the sight glass      required test pressure. Add air to the tank
of the displacement chamber.                    or release air from the tank as necessary to
                                                maintain this pressure throughout the
    If the initial water height H1 is equal to  leakage rate test.
zero, the last term of Eq. 6 disappears and
the leakage rate is given by:                   Flow Meter Accumulation Leakage
                                                Test Instrumentation
           K H2 Pb2        T2  293
                               + 273            Instrumentation required for the auxiliary
(7)  Q=                                         chamber flow meter technique of leakage
                      t2 − t1                   testing of the system shown in Fig. 18
                                                                                                      Leak Testing of Petrochemical Storage Tanks 545
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includes a cube shaped bladder, a very low   Leakage Rate Testing of Tank by
pressure differential integrating flow       Auxiliary Chamber Accumulation
meter, a manometer, a barometer and a        Flow Meter Technique
thermometer. After tank pressurization is
complete, the previously tested cube         After completion of preliminary
shaped bladder (shown to the right of the    instrumentation system tests, the access
tank in Fig. 18) is connected to the roof    hole valve is opened and the cube shaped
fitting at the top of the tank. The          bladder completely deflated. Then the
differential integrating flow meter is       access hole valve is closed and a plug
installed with a valved connection to this   installed in the valve outlet. The valve
bladder. Both the manometer and the          between the bladder and the flow meter is
thermometer are included in the line to      closed. The leakage rate test is started and
the flow meter. The barometer is placed      the starting time t1 is recorded. At the end
near the bladder container.                  of the required leak testing period, the
                                             time t2 is recorded and the valve is closed
    For preliminary leak testing of the      between the bladder and the tank. At this
instrumentation and its connections, the     time, the bladder must be at least just
flow meter outlet valve is closed. The       slightly less than completely inflated or
valve in the line from the roof connection   the leak test will be invalid.
to the bladder is opened, as is the valve
between the bladder and the flow meter.          The bladder container (a cube shaped
Then, through a valved connection on         box with one side transparent) is now
the tank top access hole cover, the          pressurized to the very low differential
volume above the tank diaphragm is           pressure specified for the flow meter. To
pressurized to a slight gage pressure        measure the leakage accumulated within
sufficient to inflate the bladder. This      the flexible cube shaped bladder, the valve
pressure is shown by the manometer on        between the bladder and the flow meter is
top of the storage tank. Then bubble leak    opened, as is the outlet valve from the
tests are made by applying solution film     flow meter. The pressure in the box
to a bladder and flow meter connections,     containing the bladder is adjusted as
the top manometer connections and the        necessary to maintain a specified water
access hole valve and its connections. Any   column height in the manometer
leaks indicated by the bubble test solution  connected into the line between the
must be repaired and retested to show no     bladder and the flow meter. Record the
leakage indications.                         manometer pressure m and the
                                             temperature T in the line to the flow
                                             meter. Also, record the barometric
FIGURE 18. Arrangement for auxiliary bladder accumulation flow meter technique for leakage
rate test of variable volume petrochemical storage vessel with movable diaphragm within the
tank.
                        Roof fitting
                 Close
                                             Manometer              Hose or tubing
                                                         Diaphragm
                                             Air
                                                                                         Container (one side clear)
                                                                                         Bladder
            H2O                                                      Air line         Air supply
Manometer                                                             Flow meter
                                                                    H2O
                                                                    Relieving device
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pressure Pb. As soon as the bladder is fully
deflated, close both the outlet and inlet
valves to the flow meter. Record the
accumulated flow meter reading as the
volume V.
Calculation of Leakage
Rate for Accumulation
Flow Meter Leak Test
The total leakage rate Q for the vessel of
Fig. 18 is then calculated in SI units by
use of the relation:
( )(10) Q                293
          V Pb + Pm  T + 273
=         t2 − t1
where Q is leakage rate (Pa·m3·s–1 at
20 °C), Pb and Pm are pressure (pascal), V
is volume (cubic meter), T is temperature
(degree celsius) and t is time (second).
    In mixed English units, the leakage rate
is given by:
          V Pb + Pm  530
(11) Q =  14.7 T + 460
          t2 − t1
In Eq. 11, Q is leakage rate (std ft3·h–1 at
70 °F), T is temperature (degree
fahrenheit), Pb is barometric pressure
(lbf·in.–2 absolute), Pm is manometer
pressure (lbf·in.–2 gage, converted from
in. H2O) and t is time (hour).
                                                                                                      Leak Testing of Petrochemical Storage Tanks 547
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References
 1. Guide to EPA Materials on Underground        12. API Publication 307-92, Engineering
     Storage Tanks. EPA-510-B-94-007.                 Assessment of Acoustic Methods of Leak
     Cincinnati, OH: Environmental                    Detection in Aboveground Storage Tanks.
     Protection Agency (February 1993).               Washington, DC: American Petroleum
                                                      Institute (1992).
 2. Beall, C., L. McConnell, A. Nugent and
     J. Parsons. Detecting Leaks: Successful     13. API Publication 322-94, Engineering
     Methods Step-by-Step.                            Evaluation of Acoustic Methods of Leak
     EPA/530/UST-89/012. Cincinnati, OH:              Detection in Aboveground Storage Tanks.
     Environmental Protection Agency                  Washington, DC: American Petroleum
     (November 1989).                                 Institute (1994).
 3. Straight Talk on Tanks: Leak Detection       14. Cole, P.T. “Acoustic Methods of
     Methods for Petroleum Underground                Evaluating Tank Integrity and Floor
     Storage Tanks and Piping.                        Condition,” First International
     EPA 510-K-95-003. Cincinnati, OH:                Conference on the Environmental
     Environmental Protection Agency                  Management and Maintenance of
     (July 1995).                                     Hydrocarbon Storage Tanks [London,
                                                      United Kingdom]. East Sussex, United
 4. Sherlock, C.N. “A Catch-22: Leak                  Kingdom: Business Seminars
     Testing of Aboveground Storage Tanks             International Limited (November
     with Double Bottoms.” Materials                  1992).
     Evaluation. Vol. 53, No. 7. Columbus,
     OH: American Society for                    15. Miller, R.K. “Tank-Bottom Leak
     Nondestructive Testing (July 1994):              Detection in Above-Ground Storage
     p 827-832.                                       Tanks by Using Acoustic Emission,”
                                                      Materials Evaluation. Vol. 48, No. 6.
 5. API Standard 650-93, Welded Steel                 Columbus, OH: American Society for
     Tanks for Oil Storage, ninth edition.            Nondestructive Testing (June 1980):
     Washington, DC: American Petroleum               p 822-824, 826-828.
     Institute (1995).
                                                 16. API Publication 327-94, Aboveground
 6. API Standard 620-96, Design and                   Storage Tanks: A Tutorial. Washington,
     Construction of Large, Welded,                   DC: American Petroleum Institute
     Low-Pressure Storage Tanks, ninth                (1994).
     edition. Washington, DC: American
     Petroleum Institute (1996).                 17. API Publication 334-96, Guide to Leak
                                                      Detection for Aboveground Storage Tanks,
 7. API Standard 653-95, Tank Inspection,             first edition. Washington, DC:
     Repair, Alteration, and Reconstruction.          American Petroleum Institute (1996).
     Washington, DC: American Petroleum
     Institute (1995).                           18. API Recommended Practice 574-90,
                                                      Inspection of Piping, Tubing, Valves, and
 8. ASME B96.1-93, Welded                             Fittings, first edition [replaces Guide for
     Aluminum-Alloy Storage Tanks. New                Inspection of Refinery Equipment,
     York, NY: American Society of                    Section 9]. Washington, DC: American
     Mechanical Engineers (1993).                     Petroleum Institute (1995).
 9. API Recommended Practice 651-91,
     Cathodic Protection of Aboveground
     Petroleum Storage Tanks, first edition.
     Washington, DC: American Petroleum
     Institute (1991).
10. API Recommended Practice 652-91,
     Lining of Aboveground Petroleum Storage
     Tank Bottoms, first edition.
     Washington, DC: American Petroleum
     Institute (1991).
11. API Recommended Practice 575-95,
     Inspection of Atmospheric and
     Low-Pressure Storage Tanks, first edition.
     Washington, DC: American Petroleum
     Institute (1995).
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14
                                                                   CHAPTER
                  Leak Testing of Hermetic
                                                  Seals
                                                                                 George R. Neff, Isovac Engineering, Incorporated,
                                                                                 Glendale, California
                                                                                 Jimmie K. Neff, Isovac Engineering, Incorporated,
                                                                                 Glendale, California
                                                                                 Donald J. Quirk, Fisher Controls International, North
                                                                                 Stonington, Connecticut
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PART 1. Characteristics of Gasketed Mechanical
Hermetic Seals
Functions and Limitations                     one side of the seal while the other side of
of Hermetic Seals                             the seal is subject to atmospheric pressure.
                                              However, if it is decided to draw a
By strict definition, a hermetically sealed   vacuum on one side of a seal for test
device or system is one in which the gas      purposes, the leakage rate test data would
or gases contained in the internal free       obviously also be applicable to hermetic
volume of the sealed system cannot            seals used for vacuum sealing as well. The
escape or be exchanged with any gas,          alternative to drawing a vacuum on one
vapor or liquid contained in the              side of the seal would be to pressurize one
environment external to the sealed            side of the seal to 200 kPa (2 atm) and
system.                                       allow leakage to occur through the
                                              pressure boundary of the sealed device to
    In reality, such hermetic seals do not    air at 100 kPa (1 atm).
exist: given enough time, any gas should
be able to permeate or diffuse through        Classification of Levels of
any known material. For this reason, either   Molecular Sealing by
maximum rates of leakage or degrees of        Vacuums
hermeticity are usually specified for
particular operating environments and         Leakage from atmospheric pressure to
applications. If a device passes the          vacuum is typically molecular leakage
specified leak testing requirements for the   because different gases leak at different
hermetic seal, this device can then be        rates in a given seal. In addition, liquid
stated as being hermetically sealed to the    solutions will be selectively separated as
degree specified. This does not imply,        they go through a seal having a leakage
however, that the same part or device         rate of the order of magnitude of 1 × 10–7
could not leak later because of its           Pa·m3·s–1 (1 × 10–6 std cm3·s–1) or less.
deterioration, mishandling, more              Selective permeability and diffusion of
stringent service, environment or other       gases and liquids through solid sealing
causes.                                       materials also depend on molecular
                                              structure. Thus, molecular sealing is
Typical Pressure                              needed for prevention of leakage into
Differentials Applied to                      vacuum. Three commonly defined levels
Hermetic Seals during Leak                    of molecular sealing are (1) commercial
Testing                                       vacuum sealing, (2) hermetic sealing and
                                              (3) hard vacuum sealing. Vacuum levels
The purpose of a hermetic seal is to          are defined by the American Vacuum
prevent any transfer of gases or vapors       Society (see Table 1).1
from one area to another. It is commonly
thought that a hermetically sealed device     Requirements for Sealing of
is used to preserve the contents of a         Commercial Vacuum
container in some steady state. In the
strict definition of the word hermetic, a     Commercial vacuum systems typically
pressure differential across the seal is not  operate at pressure levels between 10 and
a requirement. However, many types of
hermetic seals are used in service under a    TABLE 1. American Vacuum Society levels of vacuum.1
pressure differential of only 100 kPa
(1 atm or 760 torr) or less. Thus, many       Vacuum ____________________P_r_e_s_s_u_r_e__________________
leak testing specifications call for
application of a testing condition that       Level       SI Unit                           (torr)
uses 100 kPa (1 atm) differential pressure
across the seal for purposes of testing only  Low         1.01 × 105 to 3.3 × 103 (7.6 × 102 to 25)
the leakage rate of the seal.                 Medium
                                              High        3.3 × 103 to 1.33 × 10–1 (25 to 1 × 10–3)
    The easiest way to provide a 100 kPa      Very high
(1 atm) pressure differential across the      Ultra high  1 × 10–1 to 1.33 × 10–4 (1 × 10–3 to 1 × 10–6)
pressure boundary of a hermetically sealed
device or system is to draw a vacuum on                   1 × 10–4 to 1.33 × 10–7 (1 × 10–6 to 1 × 10–9)
                                                          ≤ 1 × 10–7  (≤ 1 × 10–9)
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0.01 Pa (100 and 0.1 mtorr). Very seldom      damage to components and their
will these vacuum pressures be lower than     performance.
10 mPa (0.1 mtorr) — that is, of the order
of 7 mPa (1 × 10–6 lbf·in.–2). They are       Permeability Requirements
simply gross vacuums used in vacuum           for Hermetic Seals Having
distillation of chemicals, vacuum melting     Very Small Leakage Rates
furnaces and vacuum processes used to
reduce the amount of water in food            For hermetic seals to have very low
products, for example. However, effective     leakage rates, it is essential that the seals
vacuum seals are required for such            and envelopes be fabricated from
systems to decrease the energy needed to      materials having very low permeabilities
evacuate the system to working pressures      to passage of vapors, gases and liquids.
and to maintain the system’s vacuum           Fluids travel directly through permeable
when the pumps are shut off for one           materials by a process somewhat like
reason or another. It should be               osmosis. The main difference is that
emphasized that, at this vacuum level, the    permeability refers to transmission of
main concern is to minimize leakage           gases, whereas osmosis refers to
across the seal.                              transmission of liquids. Like solvents,
                                              different gases have different rates of
Requirements for Sealing against              travel through any specific permeable
Outer Space and Hard Vacuums                  material. Conversely, a single type of gas
                                              travels through different permeable
Hard vacuums are those with pressure          materials at different rates. For example,
below the level of 100 µPa (1 µtorr). These   Table 2 indicates the air permeabilities of
low pressures cause problems in sealing       different types of rubber materials.2 These
not encountered when sealing for higher       permeabilities are expressed in terms of
vacuum pressures. The low pressures of        gas at a specific temperature passing per
hard vacuum cause volatilization of           unit time through a specified area of a
materials such as plasticizers in elastomer   material with a certain thickness (1 m2 of
sealing materials. There can also be          area with 1 m thickness), under a
outgassing or sublimation of rubber           differential pressure of 100 kPa (1 atm).
materials into the vacuum. It has been        The SI unit of permeability is taken as
suggested that most elastomers have           (Pa·m3·s–1)·(m2·m–1)–1 or
vapor pressures between 10 mPa and
100 nPa (100 and 0.001 µtorr), so that        TABLE 2. Air permeabilities of elastomers. Permeability is
they will vaporize selectively as pressures   expressed in Pa⋅m3⋅s–1⋅(m2⋅m–1)–1 at 22 °C (72 °F), which
are reduced in a hard vacuum system.          would permeate through 1 m2 of elastomer 1 m (40 in.)
    Alternatively, it may be possible that    thick at a differential pressure of 100 kPa (1 atm) at a
vaporization of such polymers is preceded
by depolymerization, whose products are       temperature of 80 °C (176 °F). The permeabilities given
subject to sublimation. The loss due to
vaporization also depends on seal or          are for typical reinforced compounds: special
device geometry, for only those
monomers at the surface exposed to            compounding techniques can substantially change these
vacuum are removed. Certain rubbers do        rates.2
sublime at a rather rapid rate in the
pressure range from 10 to 1 µPa (100 to       Elastomer                       Permeability
10 ntorr). This sublimation is a surface
phenomenon and can erode exposed                                   10–12 Pa⋅m3⋅s–1⋅(m2⋅m–1)–1 or
surfaces of sealing materials and gaskets.                         10–7 std cm3⋅s–1⋅(cm2⋅cm–1)–1
However, other polymers may be virtually
unaffected at vacuum pressures as low as      Butyl                 0.32
100 nPa (1 ntorr) at room temperatures.       Thiokol™              0.37
                                              High acrilo nitrile   0.41
    The most critical uses of seals for hard  Hypalon S-2™          0.7
vacuums have been in the aerospace            Kel-F™                0.80
industry. Hard vacuum pressure                Low acrilo nitrile    0.8
conditions are attained at very high          Viton A™              0.88
altitudes in the earth’s atmosphere and in    Polyurethane          0.97
outer space. In these applications, it is     Chloroprene           0.98
essential that space capsules for human       Acrylon EA-5™         1.5
occupancy not lose the air needed to          Hycar 4021™           1.8
support life from their pressurized interior  GR-S™                 2.9
to the near vacuum of outer space. In         Natural rubber        4.4
addition, sealed devices that contain air to  Fluoro-rubber 1F4     9.6
conduct heat to their external surfaces       Fluoro-silicone      12.8
could lose their heat dissipation capability  Silicone             45.0
if this air were lost by leakage to the
vacuum of outer space, with resultant
                                                                                                                         Leak Testing of Hermetic Seals 551
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(1 std cm3·s–1)·(cm2·cm–1) –1 at 80 °C         Requirements for Seals to
(176 °F) and at 100 kPa (1 atm)                Maintain Internal
differential pressure. Because the             Atmospheres in Outer
quantities are very small, it is expressed as  Space Systems
(µPa·m3·s–1)·(m2·m–1)–1. This unit reduces
to µPa·m2·s–1 but is unrecognizable in this    There are two critical requirements for
form. In Table 2, butyl has a permeability     seals and gaskets that are of importance in
of 3.2 × 10–13 (Pa·m3·s–1)·(m2·m–1)–1          the hard vacuum and other operating
whereas silicone has a permeability of         conditions of outer space environments
4.5 × 10–11 (Pa·m3·s–1)·(m2·m–1)–1 or more     (see Table 3).3 One is the effect of hard
than 100 times greater.                        vacuum on the physical characteristics of
                                               flexible sealing materials; the second is
Requirements for Seals to                      the effectiveness of all seals in
Maintain Internal                              maintaining the earth’s atmosphere
Atmospheres in Near                            within vehicles or individual components.
Space Systems                                  Many space vehicle components (as well
                                               as astronauts) can function only in a
Hermetic seals are used to contain             preserved earth’s surface environment.
breathable air atmospheres in aircraft that    Consequently, seals that can cope with
fly in near space vacuum conditions in         molecular leakage are required to
the earth’s atmosphere at altitudes up to      maintain pressure in these components
30 km (100 000 ft). Leak testing for this      for long time periods. Surveillance and
type of vacuum imposes one more                communication satellites, as well as deep
condition in addition to those required
for hermetic sealing of devices whose seals    TABLE 3. Characteristics of outer space environment.
are not subject to vacuum pressure
differentials across their pressure            Low pressure
boundaries. This unique condition is the         10–4 to 10–12 Pa (10–6 to 10–14 torr) dependent on altitude
slight movement of the seal gasket in
response to the 100 kPa (14.7 lbf·in.–2)       Low density
pressure differential repeatedly impressed       10–9 to 10–17 kg⋅m–3 (1.7 × 10–9 to 1.7 × 10–17 lbm⋅yd–3)
across it. Such movement is aided by a
small shrinkage of rubbery materials used      Chemical composition
for flexible seals. In aircraft, movement of     Dissociated molecules
seals used in access doors and wing panels       Ions
was overcome by seals that were molded
in place. Many vacuum seals use the same       Thermal radiation, influencing vehicle temperature
closely controlled sealing principles to         Infrared solar radiation
attain completely reliable and reusable          Earth’s albedo
performance.                                     Infinity radiation sink (0 K)
                                                 Early space probes indicate thermal equilibrium at 70 °C (160 °F)
    The movement of a gasket or seal
caused by low pressure and shrinkage of        Other solar radiation
the rubbery element of mechanical seals          Visible radiation
in a vacuum environment acts to displace         Ultraviolet radiation
the flexible sealing element just enough         X-radiation
to break the original line of sealing
contact. Not enough force is generated by      Cosmic radiation
the system pressure to reestablish a seal        Electromagnetic (gamma rays, X-rays)
on the interfaces of the sealing surfaces if     Primary particles (protons, atomic nuclei)
contact is once broken (see Fig. 1). In          Secondary particles (electrons, positrons, mesons, neutrons)
some seal designs, the ratio of rubber to        Van Allen belt radiation (protons or electrons)
void space within the seal is controlled to
eliminate this problem of low pressure         Meteoric particles
rollout. This prevents slight movements of       Penetration
seal. It also creates high contact loading at    Abrasion
the sealing line that increases the flow of
the flexible gasket material into the          Force fields
microirregularities of the sealing interface.    Electromagnetic
This reduces or eliminates the problem of        Gravitational
shrinkage of the rubbery sealing material
when seals are subjected to near space         Conditions of Human Origin
vacuum levels of 100 to 1 µPa (1.0 to            Propulsion products
0.01 µtorr).                                     Vehicle outgassing
                                                 Acceleration
                                                 Vibration
                                                 Space debris
                                                 Hostile action
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FIGURE 1. Rollover of loose gasket that breaks hermetic seal at original contact surface, and of
molded-in-place seal that resists loss of sealing contact as the pressure across seal varies
during service: (a) O-ring in improper gland for low pressure sealing; (b) molded-in-place seal
maintains same configuration regardless of pressure level.
(a)
         Seal with no pressure applied   Seal with low pressure applied  Same seal with high pressure
                                         (some portions roll as shown,
(b)
                                             other portions maintain
                                              original configuration)
            Before assembly                                              After assembly at any
TABLE 4. Leakage rates for elastomer at vacuum conditions.3
                                                               _____________A_i_r _L_e_a_k_a_g__e_R_a__te____________
_______T_e_s_t_P_r_e_s_s_u_r_e_________  Leak Testing          µPa⋅m3 per mm       (std cm3 per inch
   Pa (torr)                                Method
                                                               of Seal per Annum of Seal per Year)
1 × 105     (7.6 × 102)                  Radioactive gas                      3                 (0.0008)
6.7 × 10–4  (5 × 10–6)                   Helium leak detector              600                  (0.1500)
2.9 × 10–5  (2.2 × 10–7)                 Pressure decay                                         (0.0011)
                                                                              4.4
2.9 × 10–6  (2.2 × 10–8)                   (ion pump)                                           (1.2200)
                                         Pressure decay                  4 900
                                           (ion pump)
space probes, that are designed to operate                 A weight loss test of this material made
in deep space for many years are in                    by exposing a microtome of material to a
special need of adequate molecular sealing             vacuum of 3 µPa (20 ntorr) showed a
to prevent loss of internal atmospheres.               weight loss of about 31 percent whereas at
                                                       a pressure of 13 µPa (0.1 µtorr) the weight
    One way to provide long term sealing               loss was only 2.0 percent. The typical
against outer space vacuum environments                leakage rate for this material at various
is to select envelope and sealing materials            pressures (by using appropriate leak
that have low vapor pressures. For                     testing techniques for each pressure
example, hard vacuums are known to                     range) were reported (Table 4). The
erode metals such as cadmium and                       leakage rate obtained when using the
magnesium. Elastomeric materials that                  pressure decay test technique and air as
have low vapor pressures (see Table 2)                 the medium were lower than those found
must be used for flexible sealing elements.            by adjusting the helium leakage rates for
A seal made of silicone rubber would                   molecular weight ratios. This suggests that
allow the pressurized air within an outer              the viscous flow rate assumption may not
space vehicle component to leak into the               apply if the flow of air through a leak
void of space. The effect of progressively             path is restricted by forces of molecular
harder vacuum levels rapidly increases the             attraction in a rubber polymer, for
out-leakage in outer space. For example,               example.
the leakage rates measured at 3 µPa
(22 ntorr) were ×103 greater with the same
material than when measured at 30 µPa
(220 ntorr).
                                                                                                                         Leak Testing of Hermetic Seals 553
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PART 2. Characteristics of Hermetically Sealed
Packages
Some Functional                                     (Some electrooptical devices are
Requirements for                                    controlled or switched on or off by
Hermetically Sealed                                 light signal inputs.)
Packages                                        7. The package must isolate the internal
                                                    electronic package from external
In general, packages for hermetic devices           electromagnetic radiation. Also, in
are designed to meet numerous specific              some instances, the package must act
requirements based on anticipated service           as an electromagnetic shield to
and environmental conditions. Some                  prevent internal circuit radiation from
common requirements include the                     permeating the enclosure and
following.                                          adversely affecting the operation of
                                                    other external circuitry.
 1. The package must provide a                  8. The package must provide a physical
     mechanically stable device enclosure           shield for mechanical contacts and
     so that reliability screening tests do         moving parts in relays and similar
     not affect the operational                     devices. It must physically protect
     characteristics of the device. Typical         explosive powders and charges in
     screening tests for high reliability           ordnance devices.
     service applications involve subjecting
     the devices to vibration, drop shock,     Conditions Causing Leaks
     centrifuge, thermal shock test            in Glass-to-Metal and
     conditions and leak testing.              Glass-to-Ceramic Seals.
 2. The package must provide electrical        The reliability of many devices depends
     feed-through connections from the         on the degree of package hermeticity. For
     internal electronic device to the         many military or high quality devices, the
     package externals electrically insulated  critical manufacturing process is the
     from the package that supplies power      formation of the glass-to-metal or
     to the device.                            glass-to-ceramic seals. The quality of the
                                               final seal determines the degree of
 3. Some packages must provide means           package hermeticity.
     for heat transfer away from an
     electronic device within the package          Generally, this manufacturing process
     to avoid damage by overheating.           is well controlled. However, much more
     Operating parameters can change           critical processes are required to provide
     significantly with variations in          hermetic seals around a large number of
     temperature.                              electrical lead wires when maintaining
                                               electrical insulation between the various
 4. The package must be resistant to           parts of the package. Manufacturing
     corrosion from external environments.     conditions that can affect both the quality
                                               of initial seals and the degradation of
 5. The package must be hermetic (sealed       glass-to-metal or glass-to-ceramic seals
     against air or gas flow in or out) to     when they are exposed to severe
     prevent exposure of the internal          environmental or operating conditions
     device to ambient environments,           such as high temperatures, thermal shock
     particularly those with high relative     and mechanical stressing include
     humidity (high moisture content). The     (1) differences in coefficients of thermal
     electrical parameters of discrete         expansion of metal and glass or ceramic
     elements comprising an integrated         materials forming the seals, (2) uniformity
     circuit can change values or be           of oxide layers grown on the metal
     degraded when exposed to a moist          surfaces to aid bonding to glass or
     environment. The proper function of       ceramics, (3) cleanliness of the metal
     relay contacts can be degraded by         surfaces before growth of these oxide
     contaminates entering the device. Or,     layers and (4) quality or volume of glass
     the reliable performance of an            surrounding the lead wires and metal or
     explosive (such as an air bag firing      ceramic surfaces.
     system) can be impaired by moisture.
 6. The package must provide a shield
     against light from external sources
     because semiconductor junction
     device parameters are light sensitive.
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Functions of Oxide Layers                     base with (2) the lead frame resting on
in Glass-to-Metal and                         (3) a slurry layer of glass beads and
Glass-to-Ceramic Seals                        organic binder. During the heating, the
                                              glass melts, the binder begins to burn off
A slight mismatch in the thermal              and the frame sinks into the glass and
coefficients of expansion of metal and        become partially bonded to the base.
glass, for example, is sufficient to cause a  Devitrification of the glass begins during
separation of the metal from the glass at     this process and continues during the
some temperature, thus permitting             subsequent semiconductor die
possible leakage. To prevent such             attachment. The process for attaching the
separation between metal and glass in         semiconductor die involves a
hermetic seals, an oxide layer is grown on    glass-to-metal eutectic bond made at
the metal surfaces before sealing them to     temperatures as high as 425 oC (800 °F).
the glass. The fusing then results in a
continuous transition from (1) the metal          After wire bonding and visual
to (2) metal oxides to (3) metal oxides in    inspection, the ceramic cap is put in place
glass and finally to (4) the glass. The       and the final sealing is performed at a
ceramics most commonly used for               temperature in the range from 450 to
hermetic seals are themselves metal           525 oC (850 to 975 °F). If all elements of
oxides, so their sealing operation involves   the manufacturing process are completed
formation of transitions (1) from ceramic     successfully, the resultant dual inline
(2) to ceramic in glass and finally (3) to    packages may be hermetically sealed. If the
glass.                                        manufacturing process uses improper
                                              materials or is not precisely controlled,
    It is essential to remove oxides, oil or  the resultant dual inline packages may
particle contaminations from metal            become leakers.
surfaces before processing them to grow
the oxide transition layers used in           Causes of Leaks in Dual
glass-to-metal seals. The cleanliness of      Inline Circuit Packages
these metal surfaces before oxide growth
and careful control of the oxidation          Manufacturing Conditions
process that forms the oxide layer are
critical factors in control of the thickness  Seal failures in solder-and-glass dual inline
of the oxide layer. In general, any surface   packages may be caused by inadequate
contamination of the materials used           control over the manufacturing processes
during the sealing process will produce a     (described just previously) or from
nonuniform seal. Uniformity of oxide          improper handling. Inadequate control of
thickness is required for high quality        the heating process and the quality and
hermetic seals.                               mixture ratio of the glass and binder can
                                              result in a leaking seal. If the glass is
Process of Manufacturing                      exposed to excessively high temperature
of Solder Glass Dual Inline                   during sealing, the organic binders will
Circuit Packages                              not burn off before the glass devitrifies (is
                                              made hard and opaque, as by prolonged
Dual inline packages (DIPs) are presently     heating). This can result in gases frozen
used for more than 50 percent of all          into the seal in small, bubblelike cavities.
hermetic integrated circuits, of which tens   Structurally weak seals, which may be
of millions or more are manufactured          porous, can also result. (Such excessive
each year. In fabricating dual inline         temperatures could occur if, for example,
packages, the glass used to seal the metal    a furnace belt were stopped by a power
lead frame (for external connections) with    failure, if a package base were left too long
the ceramic base and cap is introduced as     on a heater block in preparation for die
a slurry mixture of vitreous glass beads      attachment or if the die attachment
suspended in an organic binder. In            process were too slow.)
general, the sealing process involves the
heating of this mixture in such a way as          Cavities and porous seals can also
to allow the organic binder to evaporate      occur if the temperature at which the
while the glass is transformed from its       frame is attached to the base is too low. In
initial vitreous or liquid state to a         this case, the glass under the frame does
devitrified or crystalline state that forms   not outgas sufficiently. Blow holes can
the seal.                                     then result during the final sealing
                                              operation due to the buildup of gas
    During manufacture in a particular        pressure. (Such insufficiently high
process, the devitrification process begins   temperatures might be caused, for
with an initial heating in a belt furnace of  example, by increasing the speed of the
an assembly consisting of (1) the ceramic     furnace belt to shorten the processing
                                              time.)
                                                                                                                         Leak Testing of Hermetic Seals 555
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Some electro tin plating processes used   Leaks Caused by Improper
to provide a bright finish on the external    Handling of Other
lead frames of the sealed packages can        Hermetic Packages
also cause leaks. Acids used in this plating
process can deplete the glass, particularly   The improper handling of mechanical
adjacent to the metallic lead frame. Such     seals in the manufacturing process, the
leaks are most prevalent in parts that have   testing process and the customer
been exposed to plating solutions for         application process are major causes of
extended periods of time. These leaks         damage to hermetic seals. Many
could also result in devices that have been   glass-to-metal feed-throughs frequently
replated, as in attempts to strip and         depend on a meniscus seal at the surface
replace tin plated leads that oxidized        of the pin-to-glass interface. The seal is
during burn-in test.                          easily damaged or broken by handling.
                                              Such devices as relays use up to a dozen of
Sealants                                      these feed-throughs, all of which are
                                              vulnerable to this type of damage. A
Care must be exercised in controlling the     commonly applied technique for this is
seal materials used in manufacture of dual    an adjunct sealant in the form of an epoxy
inline integrated circuit packages. Too       film applied over the glass-to-metal seals.
high a concentration of the binder (in the    It is allowed and defined in the military
glass bead mixture) can result in failure to  standards for relays. Adjunct sealants are
burn off all of the binder during the         known to be only temporary under most
sealing process. The glass mixture used for   conditions. Relay socket insertion is
sealing must also be evaluated to ensure      endless and causes damage to pins due to
that it does not exhibit any abnormal         misalignment in and out of the sockets,
devitrification behavior. For example,        often the fault of the technician.
some lots of glasses have exhibited a
partial devitrification at an abnormally          Hybrid electronic devices, radio
low temperature that has prevented the        frequency devices and many of the very
complete removal of the binder during         large electronic, electromechanical devices
the sealing process. Another potential        are subjected to extreme thermal cycling
problem with the incoming glass is that       that induces severe stresses on hermetic
additives designed to adjust the thermal      seals and makes them additionally
coefficient of the expansion may not be       vulnerable to subsequent handling.
in the proper balance. Integrated circuit
packages made with such glasses may fail          The ordnance devices are frequently
in later temperature cycling tests. Such      installed in physically abusive
undesirable types of glasses can be           environments. Their handling is often
eliminated in incoming inspection by          damaging to seals due to lead wire
making thermal expansion tests on each        soldering or welding and potting.
lot of glass materials received.
                                              Manufacturing Conditions
Improper Handling                             Causing False Indications
                                              of Leakage in Packages
Inadequate control of the mechanical
handling of integrated circuit (IC)           So-called false indications of leakage can
packages can result in the degradation of     result from causes such as surface porosity
well made package seals. The application      of the seal material used in manufacture
of excessive physical stress on the package   of dual inline packages for integrated
leads can be transmitted to the brittle       circuits or electronic devices. Surface
glass seals, causing fracture and cracking    porosity could result from inadequate
that permit leakage to occur. Examples of     control of the seal materials and the
handling procedures that could apply          sealing processes. Such porosity can trap
excessive stress to dual inline integrated    the leak testing tracer gas or liquid so as
circuit packages include (1) clipping         to produce an erroneous indication of a
excess length from leads, (2) excessive or    hermeticity failure. False cavities with
repeated flexing of leads, (3) dropping of    volumes nearly as large as 10 mm3 can
integrated circuit packages, possibly in      sometimes be found in the seal materials
automatic handling and loading                near the end of the integrated circuit
operations, and (4) excessive heat when       package, totally separated from the
soldering integrated circuits to printed      internal cavity of the package.
circuit boards.
                                                  Perhaps the amount of seal material
                                              has been selected only on the basis of
                                              providing a desired thickness of seal in
                                              the area of the lead frame. If too little seal
                                              material is used, it may happen that the
                                              surface tension of the liquid glass will pull
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the seal material toward the frame to         higher temperatures. Such leaks are
leave a false cavity at either end of the     apparently the result of weak seals that
integrated circuit package during the         fail under the stress resulting from
sealing process.                              differences in the thermal coefficients of
                                              expansion of the constituent parts of the
    The glass in this area may also be        seal. This behavior is not restricted to one
weaker than that near the frame and           type of package but rather has been found
package cavity. In this case, cracks or a     in a wide variety of integrated circuit
porous seal may develop to provide a leak     packages.
to the outside of the package. Such a false
cavity would give a leakage indication            Analyses have also revealed that high
that could not be distinguished from a        temperature burn-in tests and baking
true leak to the device cavity by using       before gas analysis alter the types and
either the helium or radioactive tracer gas   concentrations of gases of the ambient
leak testing techniques. In some cases, a     atmosphere within the integrated circuit
false leak can be verified by using a liquid  packages, especially with fine leakers. For
dye penetrant test. In all cases it should    example, such tests have resulted in
be noted that specifications state that the   effects such as (1) increases in the
package shall not leak. Therefore, it is      concentration of hydrogen, (2) decreases
valid to reject these leakers.                in the concentration of water and
                                              (3) increases or decreases in the
Handling Conditions                           concentration of carbon dioxide.
Causing False Indications
of Leakage from Hermetic                          The outgassing of package materials
Packages                                      during a reliability stress testing at
                                              elevated temperatures is a possible source
False indications of leakage, usually seen    of contamination of the internal
only during helium leak testing, can be       atmosphere that could be detrimental or
caused by careless handling that leaves       degrading to the operational
fingerprints, pencil marks or dirt on the     characteristics of the hermetically sealed
surfaces of hermetically sealed packages. A   electronic device. In other cases, the
single fingerprint has been shown             thermal shock tests (specified in military
experimentally to increase an initial         qualification procedures) had fractured
leakage rate reading of 10–8 Pa·m3·s–1        the glass-to-metal seal in the lead frame of
(10–7 std cm3·s–1) to an erroneously high     integrated circuit packages. These
indication level of 5 × 10–7 Pa·m3·s–1        fractures, that allowed water vapor to
(10–6 std cm3·s–1). This would correspond     enter into the package interiors during the
to an increase of 50 times the true leakage   subsequent water quench, went
rate before the fingerprint was made.         undetected in the hermeticity leak tests
Treating electronic packages with a           that followed.
solvent rinse, followed by a high pressure
air blast, after helium pressurization, can   Sources of Water
reduce this problem significantly. Some       Contamination during
users have found that a 10 min bake at        Manufacture of Sealed
100 oC (210 oF), following the helium         Circuit Packages
pressurization, improves the repeatability
of the helium leak testing operation.         The contaminant of greatest concern in
Surface gas rejections are almost             the internal ambient atmospheres of
nonexistent with the radioactive gas test     sealed integrated circuit and electronic
technique.                                    component packages is water (both
                                              adsorbed and in the form of water vapor).
Elevated Temperature                          It is generally believed that there is a
Testing Conditions Causing                    relationship between the relative
Leaks in Hermetic Seals                       concentrations of oxygen and water that
                                              will penetrate a leaking package, with the
In addition to standard hermeticity tests     ratio of oxygen to water content near
performed at room temperatures, it has        seven to one. However, there are no
often been very useful to perform similar     general data to indicate at what
tests at elevated temperatures in the range   concentration moisture has an adverse
from 55 to 85 oC (131 to 185 °F). This        effect on the sealed electronic devices.
range includes the typical operating          The ideal situation would be that in
temperatures of many sealed devices. It       which the internal gas atmosphere in the
has been found that some devices that         sealed integrated circuit package was pure
pass fine leak tests performed at room        nitrogen. The presence of appreciable
temperature will fail when tested at          concentrations of moisture makes the
                                              measurement of package leakage rates
                                              more difficult.
                                                                                                                         Leak Testing of Hermetic Seals 557
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PART 3. Techniques for Gross Leak Testing of
Hermetically Sealed Devices
Definitions of Gross and                                    reliability uses, hermetically sealed devices
Fine Leak Testing of                                        with leakage rates greater than some
Hermetic Seals                                              prescribed value are rejected. This limit
                                                            may be as small as 1 × 10–9 Pa·m3·s–1
The gross end of the range of leakage rates                 (1 × 10–8 std cm3·s–1). Leak test screening
of hermetic seals is defined as those                       has been necessary for achievement of
devices with leakage rates grater than                      high reliability systems, not just for
10–7 Pa·m3·s–1 (10–6 std cm3·s–1). In spite of              military uses but for many other uses.
the fact that these leakage rates are called                Typically, these leak tests may cause
gross, the leaks are those that would occur                 rejection of about two percent of the high
with circular holes with diameters in the                   quality devices in production tests, but in
range of micrometers. Figure 2 shows the                    some cases rejection rates as high as
theoretical relationship between                            30 percent are found in critical military
equivalent circular hole size and leakage                   tests. Failures of hermetically sealed
rates. Actually, the leaks in hermetic seals                semiconductor packages have lead to
are not circular holes, but rather consist of               about 13 percent of the operational
cracks or pores of various sizes. Thus, the                 failures that occur in high reliability
task of leak testing such devices is more                   integrated circuit electronic systems.
difficult than would normally be implied
by the word gross. In hermetically sealed                       Although hermetic seal testing is both
packages, overall leakage rates greater                     necessary and extensive in industry, there
than 10–8 Pa·m3·s–1 are typically found to                  is still a lack of a sound technical basis for
be harmful.                                                 clear cut specifications for maximum
                                                            allowable leakage rates.
    The fine end of the range of hermetic
seal leakage rates extends downward from                        It has been established by experiment
10–7 Pa·m3·s–1 to an indefinite limit,                      and specified in the military standards,
perhaps as low as 10–12 Pa.m3·s–1. For high                 that all wet or liquid immersion gross leak
                                                            test procedures interfere with the
                                                            reliability of the dry gas leak testing of
                                                            hermetic seals.
FIGURE 2. Theoretical relation of leakage rate to ideal circular hole leak diameter, assumed for
hermetic seals. Empirical test data obtained with capillaries ranging from 8 to 30 mm (0.3 to
1.2 in.) in length.
       10.0 (40)
Leak diameter, µm (10–5 in.)  1.0 (4.0)
                              0.1 (0.4)
                              0.01
                                     10–9   10–8     10–7    10–6                          10–5     10–4
                                    (10–8)  (10–7)  (10–6)  (10–5 )                        (10–4)  (10–3)
                                                    Leakage rate, Pa·m3·s–1 (std cm3·s–1)
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Major Leak Testing                            surfaces. The clear glass devices are then
Techniques Used for Gross                     examined visually for dye indications
Leak Testing of Hermetic                      trapped within the cavities of the
Devices                                       transparent device packages.
Gross leak testing techniques used for            The use of dye penetrant for leak
testing hermetically sealed electronic        testing of opaque packages for electronic
devices in the gross leakage rate range       devices has not been found to be reliable.
from 10–7 to 10–3 Pa·m3·s–1 (10–6 to          For example, 100 devices that indicated
10–2 std cm3·s–1) have included (1) liquid    large leaks during a fine leak test were
dye penetrant tests, (2) elevated             subsequently tested for gross leaks with
temperature bubble tests, (3) back pressure   the dye penetrant leak testing. A
bubble tests, (4) weight gain leak tests,     commercial dye penetrant was used and
(5) holographic leak tests and                the devices were bombed during
(6) krypton-85 pressurization techniques.     immersion in this liquid penetrant for 3 h
                                              at a pressure of 600 kPa (90 lbf·in.–2 gage).
    Each of the preceding leak tests will     After their exterior surfaces were cleaned,
detect leaking devices. However, the          these devices were placed in a vacuum
choice of which test to use depends on        chamber to produce a higher differential
the type of package used to enclose the       pressure. They were carefully observed for
device, as well as on the choice of           evidences of the dye leaking back out of
additional fine leak tests to be used on the  the packages. After having been sorted
same device packages. Cleanliness is          into good and bad groups, these packages
absolutely essential for accurate leakage     were repressurized and opened at
testing with hermetically sealed device       atmospheric pressure to determine if there
packages. Dye penetrant leak tests are        was any evidence of dye within the
used for glass enclosed devices (where the    cavities. In these tests, 19 percent of the
dye can be seen through the device            “good” devices (that had shown no
enclosure in case of leakage) and for         evidence of leakage in the dye penetrant
failure analysis of devices whose             tests) were found to contain dye within
enclosures can be opened to reveal            the sealed cavities. Of the rejected “bad”
leakage paths during destructive failure      devices that showed prior indications of
analyses. Elevated temperature bubble         leakage in the dye penetrant tests,
testing is used for testing the gross leaks   3 percent were found to have no dye
into the 10–5 Pa·m3·s–1 (10–4 std cm3·s–1)    within the cavities. After duplications of
range. Back pressure leak testing is used     the dye penetrant tests on other devices
for leak testing into the 10–6 Pa·m3·s–1      produced similar unreliable test
(10–5 std cm3·s–1) leakage range. Weight      indications, it was concluded that the dye
gain leak tests are used for leak testing to  penetrant gross leakage test was not useful
the limit of gross leakage ranges of          for leak testing of devices sealed in
10–6 Pa·m3·s–1 (10–5 std cm3·s–1). The        opaque packages.
radioactive krypton-85 back pressurization
is being used for gross leak testing of both  Limitations and Advantages of
devices with cavities and for zero cavity     Dye Penetrant Tests of Electronic
devices. The application with cavities uses   Devices
an extension of the fine leak applications.
The zero cavity technique uses the            The primary limitations of dye penetrant
adsorptive gettering of krypton-85 gas by     leak testing of hermetically sealed
activated carbon that has been enclosed       electronic devices are (1) interference
within the device.                            caused by particulate matter in the dye
                                              penetrant liquids that plug up holes and
Dye Penetrant Gross Leak                      (2) improper cleaning of the exterior
Testing of Hermetically                       surface of the devices under test, following
Sealed Electronic Devices                     pressurization, to remove the excess
                                              surface penetrant. Inadequate cleaning can
A visible dye liquid penetrant is             result in rejection of good devices.
commonly used for gross leak testing of       Overcleaning can wash the dye out of the
clear glass hermetic packages for             leakage paths in device packages, in the
electronic devices. The technique used is     largest part of the gross leakage range.
to apply external pressures of 300 to
600 kPa for bombing times of the order of         However, the dye penetrant test
3 to 10 h to the device packages when         technique is useful as a failure analysis
submerged in fluorescent dye or in a          technique that can be used not only to
commercial dye penetrant liquid. The          confirm the existence of the leak, but
package exterior surfaces are then washed     sometimes also to identify the leakage
to remove excess penetrant from the outer     path through the device packages. If the
                                              cavity within the device package has not
                                              filled completely with the dye penetrant,
                                              the dye indications usually make the
                                              leakage path definable.
                                                                                                                         Leak Testing of Hermetic Seals 559
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Elevated Temperature                          immersion baths. Identification tags and
Bubble Leak Testing of                        coating are the most common causes of
Hermetic Devices                              contaminants on the surfaces of devices
                                              under test. Lint is the major contaminant
Elevated temperature bubble testing is        in the immersion bath itself.
performed by immersing the hermetically
sealed device package under test in a hot         Surface contamination of microcircuit
fluid and observing any indications of        packages can be eliminated by careful
bubble emissions caused by gas escaping       selection of the time and location during
through leaks as a result of the increase in  production processing of devices under
internal temperature and contained gas        test. Alternatively, the devices under test
pressure. For microcavities, the normal       could be subjected to precleaning to
technique is to immerse the devices in        remove surface contaminants and
125 °C (257 °F) perfluorocarbon liquid for    adsorbed gases before immersion in the
a period of 30 s, observing any bubble        bubble test bath. Cleanliness of the
emissions and rejecting the sealed package    immersion bath fluid is best controlled by
for any leakage indicated by a stream of      a circulated filtration system and by
bubbles. A stream of bubbles is defined as    prerinsing of the test specimens. The
a visual indication of more than two          problem of emission from heater elements
bubbles originating from the same point       can be eliminated by the immersion types
on the package and typically rising           of heaters or by sand placed so that
through the immersion fluid.                  external heaters are not in direct contact
                                              with the glass container used for the
    In immersion bubble testing, most of      immersion fluid.
the hermetically sealed devices that are
rejectable will be characterized by a very    Back Pressure Bubble
small stream of bubbles that will start to    Emission Leak Testing of
be visible after about 15 s of immersion in   Hermetic Devices
the heated liquid bath and last until test
object removal after 30 s. Because these      Back pressure bubble testing is one of the
bubble streams are sometimes very fine        more commonly used gross leak tests.
and hairlike in appearance, it is necessary   Many persons start to use this test when
to illuminate the immersion bath              they have the first flat tire on their
inspection zone with an intense light         bicycle, immersing the pressurized tire in
(such as the lamp used with a microscope      water to see where bubbles indicate leak
or a projection lamp). The background         locations. Generally, the back pressure test
against which the bubble emission stream      is conducted by immersing a test
is to be observed should be dull and          specimen that has an internal pressure
nonreflective to provide high contrast for    greater than 100 kPa (1 atm) into a liquid
the illuminated bubbles. The observer         bath and by watching for streams of
should use an optical magnifier of at least   bubbles coming from it. The higher this
3× magnifying power that provides a field     internal pressure, the greater the chance
of observation large enough that all of the   of leak detection.
visible surface of the device being tested
can be seen at one time. The angle of             The normal technique used to provide
view should be at least within 30 degrees     back pressurization of sealed microcircuit
of the perpendicular to the area under        packages is first to evacuate each device to
observation. Inspectors should have           a vacuum of 700 Pa (5 torr absolute) for a
adequate vision acuity and patience to        period of 1 h. Then the devices are
persist in observation for the entire         pressurized when immersed in a
immersion period.                             perfluorocarbon liquid with a low boiling
                                              point, that is, 50 oC to 57 oC (122 oF to
Control of Interfering Effects in             135 oF). Pressurization occurs either (1) at
Elevated Temperature Bubble Leak              an absolute pressure of 620 kPa
Testing                                       (75 lbf·in.–2 gage) for 2 h or (2) at a gage
                                              pressure of 200 kPa (30 lbf·in.–2 gage) for
Effects that interfere with the ease and      10 h. The test devices are then air dried
reliability of elevated temperature bubble    for a period of about 2 to 4 min before
testing of sealed devices include             leak test processing by the elevated
(1) contamination on the surfaces of          temperature bubble testing technique.
devices under test that causes false
bubbling or bubble emission from                  In back pressure testing, the time
adsorbed gases or sources other than          between removal of the test devices from
leaks, (2) particulate matter in the          the pressurizing fluid and their immersion
perfluorocarbon immersion bath that may       into the hot bath of bubble testing fluid
look like a bubble stream and (3) bubbles     must be carefully controlled. If the device
generated from the heaters used in the        is immersed too quickly, it will be covered
                                              with escaping bubbles (and look like
                                              carbonated water). This makes it very
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difficult to decide whether bubbles                                         this fluid occurs during a bombing time of
indicate true leaks. If the test devices are                                from 2 to 10 h, the pressure rise will be
dried for an excessive time period, the                                     quite significant when the liquid is
fluid that had been forced in during                                        brought to a boil at 50 oC (122 °F). This
pressurization will have time to escape                                     extends the range of leakage
and evaporate. The best range of waiting                                    measurements to leakage sensitivities
time between removal from the                                               considerably better than those attainable
pressurization bath and immersion into                                      with elevated temperature bubble tests
the bubble testing bath is in the range of                                  made with no pressurization.
2 to 5 min. However, the size of the sealed
electronic package and its material also                                    Weight Gain Leak Testing
have to be considered to select the                                         of Hermetically Sealed
optimum wait time.                                                          Electronic Devices
Characteristics of                                                          The measurement of weight gain of
Perfluorocarbon Test                                                        hermetically sealed electronic devices is
Liquid Used in Weight                                                       not a widely used technique for their
Gain and Back Pressure                                                      gross leak testing. The technique can be
Bubble Leak Testing                                                         quantitative and the leakage rate can be
                                                                            determined if the bombing time and
Figure 3 shows that the rate of flow of a                                   pressure are known because the rates of
perfluorocarbon test liquid is about                                        flow of the perfluorocarbon test fluid are
0.1 mg·min–1 under a pressure of 700 kPa                                    known.
(100 lbf·in.–2 gage) through a leakage path
that would have a standard leakage rate                                         The test procedures used in weight gain
for air of 5 × 10–7 Pa·m3·s–1 (5 × 10–6 std                                 leak tests include the following steps:
cm3·s–1). The perfluorocarbon liquid                                        (1) weigh each specimen to be tested,
shown in this example has a density of                                      (2) pressurize the specimen in a
1.7 g·cm–3 at 25 oC (77 °F). This liquid                                    perfluorocarbon liquid for a specific time
boils at 50 oC (122 °F).                                                    period at a specified pressure, (3) reweigh
                                                                            the specimen to determine if liquid
    Thus, it is apparent that, if a sealed                                  in-leakage has occurred and (4) compare
electronic device leaks and in-leakage of                                   the pretest and posttest weight values.
FIGURE 3. Leakage flow rates observed with liquid fluorocarbon test fluid under pressures of
200, 400 and 700 kPa (30, 60 and 100 lbf·in–2 gage), passing through leaks with known
atmospheric pressure air leakage rates. The gas leakage rates of the capillaries were measured
using one atmosphere of helium at one end of the capillaries and a mass spectrometer helium
leak detector at the other end. (These data were converted to equivalent rates of air leakage.)
The fluorocarbon liquid leakage rates were measured by connecting one side of each capillary
tube to a pressurized reservoir of fluorocarbon liquid, connecting the other end to an empty
reservoir and measuring the amount of fluid that had passed through the capillary in 24 h.
Five data points were obtained at each leakage rate and at each pressure.
Flow rate, g·s–1 (oz·min–1)  1 × 10–2 (2.1 × 10–2)                                                       700 kPa
                                                                                           (100 lbf·in.–2 gage)
                             1 × 10–3 (2.1 × 10–3)
                                                                                 400 kPa
                             1 × 10–4 (2.1 × 10–4)                  (60 lbf·in.–2 gage)
                             1 × 10–5 (2.1 × 10–5)                          200 kPa
                                                                            (30 lbf·in.–2 gage)
                             1 × 10–6 (2.1 × 10–6)
                                                                    10–6     10–5                                  10–4    10–3
                             1 × 10–7 (2.1 × 10–7)                  (10–5)  (10–4)                                (10–3)  (10–2)
                                                             10–7
                                                            (10–6)
                                                                    Leakage rate, Pa·m3·s–1 (std cm3·s–1)
                                                                                                                         Leak Testing of Hermetic Seals 561
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Before pressurization, the electronic      packages, generally bodies with metal lids,
devices to be leak tested are first weighed,   by using laser light reflected off the lid of
usually to the nearest 0.1 mg                  the package being evacuated. The
(3.5 × 10–6 oz) or sorted by weight into a     technique measures the leakage rate of all
cell that has a span of 0.5 mg                 packages on a tray simultaneously.
(1.8 × 10–5 oz). The devices are then          Devices are placed in a chamber and the
normally subjected to a vacuum with a          chamber is either pressurized or
pressure of 650 Pa absolute (5 torr) for a     evacuated. The resultant change in
period of 1 h, before pressurization. The      pressure on the lid of the package will
test devices are then immersed in a liquid     cause the lid of a package to undergo
perfluorocarbon. The bombing time (or          concave or convex deformation. Multiple
time of device exposure to the pressurized     hybrid electronic packages mounted on
liquid) is typically in the range of 2 to      circuit boards can be leak tested by this
10 h, with bombing pressures of 300 to         method, which uses laser interferometry
600 kPa (45 to 90 lbf·in.–2 gage). After       to measure microscopic deformations in
completion of this pressurization period,      the lid of the package (Fig. 4a).
the test devices are air dried for periods of
2 to 5 min, then reweighed to the same             The package lid theoretically will not
accuracy as that used during preweighing.      deform if there is a severe, gross leak in
If an electronic device gains more than        the seal, as the internal and external
1 mg (3.5 × 10–5 oz) of weight or if its       pressures will remain the same. For fine
weight shifts by more than 0.5 mg              leaks, when a package lid is deformed due
(1.8 × 10–5 oz) cell, it is rejected. Devices
that show no significant gain in weight        FIGURE 4. Holographic leak testing system operation:
between initial and final weight               (a) schematic of application to hybrid electronic packages
measurements are usually accepted for          with metal lids; (b) holograhic image of two pharmaceutical
this gross leak test based on weight gain.     blister packages with ten cavities
Radioactive Gas Gross Leak                     (a)
Testing
                                               Laser                    Charge coupled device
Krypton-85 tracer gas is used to detect                                 video camera
gross leakage in devices with cavities                   Beam
> 0.5 cm3 (> 0.03 in.3) by pressurization at       expansion             Phase sensitive optics
pressures from 150 to 600 kPa (20 to
90 lbf·in.–2 absolute) for 36 s. The devices               lens     Beam path of selected light
are measured for internally trapped tracer                          ray reflected from center of
gas within 10 min after bombing. Large                Illuminating  package lid
cavity devices such as relays are easily               laser beam
rejected up to 1 h after bombing.                                            Chamber window
    Devices with cavities of 0.5 to 0.05 cm3        Inspection      Bulging lid (not to scale)
(0.03 to 0.003 in.3) are normally tested by          chamber                         Package under test
pressurization at 300 to 600 kPa (45 to
90 lbf·in.–2 gage), for 36 s, with the final   (b)
evacuation of the pressurization chamber
to 2.66 Pa (0.02 torr), instead of 66 Pa
(0.5 torr). The devices should be measured
for krypton-85 tracer within 10 min.
    Very small cavity devices or zero cavity
devices are tested for gross leaks through
the use of charcoal.4 The charcoal is added
to the device cavity in quantities of 1 to
1.5 mg (3.5 × 10–5 to 5.3 × 10–5 oz) and
acts as a gettering agent for the
krypton-85 gas. This technique ensures
the retention of the krypton-85 for over
30 min, allowing adequate time for
testing.
Holographic Leak Testing5
Holographic leak testing is a technique
developed in the 1980s and limited by
package type and leak rate range.
Holography can be used to leak test sealed
devices such as hybrid electronic
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to external pressure change, the lid will
                       slowly recover from deformation at a rate
                       depending on the leakage rate. The rate of
                       recovery of the lid deformation on a
                       specific package design can be determined
                       to reflect a specific leakage rate for that
                       package. The larger the leakage rate, the
                       more rapid the recovery. Holography is
                       able to detect a single wavelength of laser
                       light change in the surface deformation.
                           Gross leakage is quickly detected
                       whereas fine leakage requires several
                       minutes to detect a recovery (or change)
                       in the lid deformation of a few
                       micrometer (about 10–4 in.). Ideally, lid
                       materials should be consistent in
                       thickness and material. Application of the
                       method to other device configurations
                       can be more complicated. Very large
                       hybrids may require evacuation of the
                       chamber, if they have internal lid
                       supports, whereas smaller lids and
                       cylindrical cans are more difficult to read.
                       The practical leak rate range of
                       application appears to be from gross leaks
                       to the 10–7 Pa·m3·s–1 (10–6 std cm3·s–1)
                       leakage rate range.
                           The technique may be adapted for
                       rapid, full range leak testing to
                       10–8 Pa·m3·s–1 (10–7 std cm3·s–1) in some
                       production applications. Figure 4b shows
                       the method’s application to leak testing of
                       pharmaceutical blister packages. The
                       inspected package has laser milled holes
                       of 15, 35 and 60 µm (6 × 10–4, 1.4 × 10–3
                       and 2.4 × 10–3 in.) diameter. Figure 4b
                       shows cavities leaking at rates between
                       5 × 10–5 to 1 × 10–6 Pa·m3·s–1 (5 × 10–4 to
                       1 × 10–5 std cm3·s–1) in 0.1 s.
                                                                                                                         Leak Testing of Hermetic Seals 563
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PART 4. Fine Leak Testing of Hermetically
Sealed Devices with Krypton-85 Gas
Major Leak Testing                             bombing time are specified in advance for
Techniques Used for Fine                       specific types of components and package.
Leak Testing of Hermetic
Devices                                            During the radioisotope leak testing,
                                               the packages are placed within the
Basically, there are only two fine leak test   bombing chamber. Before introduction of
techniques that are widely used in             the krypton-85 mixture, the chamber is
industry for leak testing of hermetically      evacuated to remove the air and prevent
sealed devices: (1) the radioisotope tracer    dilution of the krypton gas mixture. The
gas leak testing technique and (2) the         bombing chamber is then backfilled with
helium tracer gas leak testing technique.      the radioactive tracer gas mixture to a
Wide variance has existed in both the test     specified pressure and the devices are
conditions and the resultant leak test         exposed to this pressurized tracer gas
sensitivity limits, depending on such          mixture for a specified period of time.
factors as the pressure differentials or
bombing pressures, the low pressure                The bombing time is chosen to permit
conditions into which leakage occurs and       a sufficient quantity of krypton-85 tracer
the sensitivities of the leak testing          gas to enter a leaking device to ensure
instruments (used in vacuum or in air at       detectability. The quantity of tracer
atmospheric or other pressures).               required is about 1011 molecules of
                                               krypton-85. That concentration is
    In the past, many procedures and           sufficient to produce an easily measured
specifications used for fine leak testing      radioactive emission through the walls of
specified a maximum leakage rate when          the device. Typically, in small cavity
measured at a differential pressure of         packages, the krypton-85 concentration
100 kPa (1 atm). The latter was not a          represents about 1 part per hundred
realistic requirement for the helium test,     million parts of air inside the part. The
because if the device were a leaker, the       radioactive gas pressurization mixture is
pressure differential of 100 kPa (1 atm)       then pumped out of the bombing
would not be maintained as time                chamber into a permanent tracer gas
progressed after pressurization and during     storage system.
the leak test exposure. More recently,
efforts have been initiated to develop             Following completion of bombing and
more realistic and consistent standards for    purging operations, the bombing chamber
helium and radioisotope tracer gas fine        is opened and each package device is
leak tests of hermetically sealed devices.     placed (either individually or in batches)
                                               within the well of a scintillation counting
Krypton-85 Fine Leak Test                      radiation detector system. They are easily
Methods for Hermetically                       tested by carrying the devices on a
Sealed Devices                                 conveyor belt through a tunnel type
                                               scintillation crystal detector at rates of
In the radioisotope gas leak test              one per second. The radiation emitted
technique, the tracer gas is usually the       from external surface adsorbed gas is
radioactive (but chemically inert)             typically beta radiation (electrons) that
krypton-85 gas, typically diluted in           can be stopped by thin layers of
gaseous nitrogen. The sealed hermetic          absorbers. The more energetic gamma
devices are bombed or subjected to the         radiation produced by disintegrations of
radioactive gas and its carrier gas under      krypton-85 gas molecules contained
pressure, nominally 300 to 800 kPa             within the packages can then be detected
absolute (45 to 120 lbf·in.–2), for specified  and counted with suitable scintillation
periods of time. The maximum external          counters.
pressure the device package can withstand
must be determined in advance so that as           The leakage rate is then calculated
high a bomb pressure as possible can be        from the counting rate caused by
used to minimize the bombing time. In          emissions proportional to the amount of
most cases, the bomb pressure and              krypton-85 that has entered the device
                                               during the bombing step and still remains
                                               within the device package at the time of
                                               the scintillation counter measurement.
                                               This rate depends on the amount of
                                               radioactive gas introduced during
                                               bombing and on the loss of that gas
                                               through the leak following the bombing
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operation. Thus, measurements are being        Detection of Zero Cavity
made during transient conditions of tracer     Device Leakage by Using
gas pressure within the test devices. The      Charcoal Gettering of
transient conditions have little effect on     Radioactive Tracer Gas
the krypton-85 test, because very small
partial pressures are needed for substantial   A device without any internal cavity has
detectability.                                 always presented a difficult and often
                                               expensive task to verify hermeticity,
Radioactive Tracer Gas for                     usually through extensive environmental
Combination of Gross                           testing. Both gross and fine leakers are
Testing and Fine Testing                       easily detected in zero cavity devices
                                               through the tracer quantities of coconut
One major advantage of the radioactive         shell charcoal placed on the inside of the
tracer gas leak test is that large quantities  device. The charcoal adsorbs large
of hermetically sealed electronic devices      quantities of radioactive krypton-85 gas
can be bombed simultaneously and rate          and easily retains the krypton-85 for
meter tests of gamma-ray emission can be       sufficient time to ensure detection after
made on the individual components or           bombing. The explosive industry uses
batches of components by automatic             small quantities of coconut shell charcoal,
means. If time permits, essentially all of     typically 1.5 mg (5.3 × 10–5 oz), in such
the radioactive tracer gas can escape          devices as air bag squibs. The mixtures are
before the scintillation counter radiation     compressed into cans at pressures as high
measurement, thus gross leakers could          as 125 MPa (1.8 × 104 lbf·in.–2). A header
escape detection.                              is then compressed or soldered in place.
                                               The powder and charcoal mixture can be
    In devices of 0.05 cm3 (0.003 in.3) and    bombed in radioactive gas (in the open
larger cavities, the technique is very         can configuration) and easily detected as a
reliable for detection of gross or fine        reject for 20 to 30 min after
leakers. The gross and fine leak test are      pressurization.
easily combined into a gross/fine
combination test with a single                     Electronic devices such as integrated
pressurization. With typical radioactive       circuits with less than 0.5 cm3 (0.03 in.3)
gas machine concentrations, a gross/fine       cavities are tested for gross/fine
combination pressurization at 520 kPa          sensitivities by adding coconut shell
(75 lbf·in.–2) requires 12 to 15 min, to       charcoal to the cavity. The charcoal is
detect leaks from 10–2 to 10–9 Pa·m3·s–1       extremely light weight and bonds to the
(10–1 to 10–8 std cm3·s–1). The                die bond material when fired. The
measurement time or readout time should        radioactive gas gettering ensures detection
always be controlled to a maximum of 10        of circuit packages with large gross leaks.
min for devices with cavities less than
0.5 cm3 (0.03 in.3) to ensure detection of     Leak Testing of Plastic
gross leakers.                                 Devices with Radioactive
                                               Tracer Gas
    The radioisotope technique for leak
testing of hermetically sealed packages is     Low gas solubility plastic hermetic
basically a more direct leakage test           devices, both with and without cavities
technique than helium leak testing             are tested for gross and fine leaks by using
because the radioactive gas is measured        krypton-85 tracer gas. Krypton-85 gas
when it is inside the package. (In helium      emits both beta particles and gamma-rays.
leak testing, the rate of escape of the        The beta emission normally is only
tracer gas through the leak is being           detected from krypton-85 gas that is
measured.) Smaller concentrations of           absorbed onto the surface of a device. The
radioactive tracer gas are sufficient for      monitoring of surface desorption of good
sensitive leak testing, so that the            epoxies takes 3 to 8 min with krypton-85
minimum detectable leakage rate is lower       pressurization for 1 × 10–8 Pa·m3·s–1
than that for the helium mass                  (1 × 10–7 std cm3·s–1) sensitivity tests.
spectrometer test, typically 10–12 Pa·m3·s–1   Following the desorption of the surface
(10–11 std cm3·s–1). Because detection is      gas, the internally trapped krypton gas is
done with the devices at atmospheric           measured to detect a leaker.
pressure, the sample handling rates can be
much greater than with helium testing,             Many types of relays use an epoxy
where the package must be placed within        coating over the glass feed-throughs to
an evacuated closed environment before         seal broken glass-to-metal seals. Such
leakage measurements are made. However,        devices are easily tested with radioactive
it is considered proper practice to            krypton gas by monitoring the beta
complete the readout in a ten minute           radiation as a wait time, after which the
time period.
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internally trapped krypton-85 is detected            number that can be checked for
to show a leaking device.                            radioactivity at the counting station
                                                     within 30 min following the required
    Zero cavity or extremely small cavity            waiting time. However, it is always
plastic devices such as plastic air bag              considered good practice to test
squibs can be tested for gross and fine              batches of very small cavity parts
leaks through coconut shell charcoal                 within 10 min. At one part per
added internally in quantities of 1.5 mg             second, that typically tests 600 devices
(5.3 × 10–5 oz). That allows wait time for           per batch. Very small devices are
the surface desorption to occur and then             tested in groups of three to five
the device is measured for krypton                   devices per analysis with the
radioactive tracer gas that was gettered             scintillation crystal, that increases the
and held by the charcoal.                            throughput to 180 to 300 devices per
                                                     minute.
Special Considerations in                        5. Sealed devices rejected during
Radioactive Tracer Gas                               radioactive tracer gas leak testing
Leak Tests of Sealed                                 obviously contain radioactive
Devices                                              krypton-85. Because it is logical to
                                                     control all radioactive materials,
The following precautions should be                  rejected or leaking devices should be
considered when selecting or using the               destroyed, deactivated in a vacuum
radioactive tracer gas leak test procedure           chamber or otherwise controlled. Most
for tests of sealed devices.                         rejected devices contain such small
                                                     quantities of radioactive tracer gas,
 1. As with helium leak testing, the                 they emit no measurable radioactive
     radioactive tracer gas test should be           dosage to humans. Gross leakers will
     performed before liquid immersion of            release that gas quickly, whereas fine
     test devices to prevent fluids from             leakers will generally require many
     clogging the leak holes or reducing the         hours to vent the gas. Puncturing or
     measured leak rate.                             smashing those devices out of doors or
                                                     in a well ventilated area will create no
 2. Parts that are made of sorptive                  hazards to humans.
     materials or that use adhesive labels       6. The possession of radioactive tracer
     are often rejected as false leakers. This       gas leak detection systems requires a
     problem is easily avoided with                  radioactive materials license from the
     radioactive krypton tracer gas, which           regulatory body for that specific area.
     emits beta particles as well as                 Each regulatory agency has a set of
     gamma-rays. The beta radiation is only          rules and regulations governing the
     detected if the krypton-85 gas is on            use of such isotopes. The manufacturer
     the outside of the device. In such              of radioactive tracer gas equipment
     cases, a short waiting period will allow        can provide information on the
     surface gas to dissipate and after              radiation technology and safe
     verification with the beta detector that        operation of such equipment.
     the surface is clean, the device is
     reliably measured for internally           Equipment for Radioactive
     trapped krypton with a scintillation       Gas Leak Testing of Sealed
     detector.                                  Electronic Devices
 3. In cases where a retest is required on      In leak testing with radioactive tracer
     sealed devices that have previously        gases, special equipment is required for
     been subjected to leak testing with        the storage, transfer and handling of the
     krypton-85 tracer gas, measurements        radioactive tracer gases, including storage
     should first be made for indications of    vessels, pumps both for pressure and
     gamma-ray emissions from residual          vacuum, valves and pressure measuring
     radioactive tracer gas trapped on or       instrumentation. A typical krypton-85 gas
     within the device package. If there is     handling system is depicted in Fig. 5. It
     any indication of krypton-85, the          contains a pressurization tank where the
     radioactivity reading must be recorded     devices are bombed; a storage tank where
     as a background radiation level for        the krypton-nitrogen gas mixture is
     that test part. Then a standard test is    stored; two vacuum pumps, one to
     applied. The background reading is         evacuate the air from the bombing tank
     subtracted from the final reading to       and one to return the krypton-nitrogen
     establish the new leak rate.               mixture to the compressor after bombing;
                                                and a compressor to transfer the tracer gas
 4. Although the radioactive tracer gas         mixture from storage to the bombing
     leak testing technique may be applied      chamber and then to compress the gas
     on either a sampling basis or on
     100 percent of all devices in a lot, the
     quantity of small cavity devices
     pressurized at one time during the
     bombing step should be limited to the
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back into storage. These functional units                               integrated with a series of both functional
    are coupled with solenoid valves, pressure                              and safety sensors.
    and vacuum sensors. The operation of
    such gas handling equipment is                                              Measurement equipment is used to
    controlled by a logic system that is                                    detect the radiation from devices that
                                                                            were nonhermetic and allowed radioactive
FIGURE 5. Example of krypton-85 gas handling system.                        gas to enter the device. Thallium activated
                                                                            scintillation crystals, housed in a 50 mm
                                  AT ST                                     (2 in.) lead shield, are used to analyze the
                                                                            radiation from devices. The
VV                      VVV                                                 instrumentation is usually a rate meter
                                                                            that is measuring the signal from a
VV                                            C                             photomultiplier tube coupled to the
                 V         V                                                scintillation crystal.
                VP VP   V            VV                                     Typical Radioactive Gas
                                                                            Pressure Bombing Cycle
Legend
  AT = activation tank                                                      The pressurization system is depicted in
   C = compressor                                                           Fig. 6, showing only the major
  ST = storage tank                                                         components of the system.
   V = valve
  VP = vacuum pump                                                           1. A test cycle begins with loading a
                                                                                 batch of devices into the bombing
                                                                                 tank.
                                                                             2. The tank is closed and evacuated to a
                                                                                 pressure of 65 Pa (0.5 torr), to prevent
                                                                                 dilution of the radioactive tracer gas
                                                                                 (Fig. 6a).
                                                                             3. The tracer gas mixture is transferred
                                                                                 from the storage vessel to the
                                                                                 bombing tank. A compressor is used, if
                                                                                 required, to compress the tracer gas to
                                                                                 the preset bombing pressure (Fig. 6b).
    FIGURE 6. Operation of krypton-85 gas system for leak testing: (a) evacuation; (b) bombing;
    (c) return of tracer gas to storage.
    (a)
                                                                                                 Vacuum
                                                                                                   pump
                                                  Bombing tank
    (b)
                                                                Compressor              Storage tank
                                                                                                     Storage tank
                       Bombing tank
    (c)
                                     Vacuum
                                      pump
                                                                            Compressor
    Bombing tank
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4. The devices then soak at the bombing       Krypton-85 Radiation
                           pressure for the time necessary to        Counting Station
                           achieve the desired sensitivity.
                                                                     The counting station is where the
                       5. The tracer gas mixture is returned to      krypton-85 tracer gas entrapped within a
                           the storage tank with a closed loop       reject device is detected as a go/no-go
                           vacuum pump in tandem with a              measurement for pass/fail only; or
                           compressor (Fig. 6c).                     measured quantitatively for an exact leak
                                                                     rate. The measurement of leakers is
                          The vacuum level achieved at the end       achieved by using a thallium activated
                      of the cycle is either 65 Pa (0.5 torr) for a  sodium iodide crystal attached to a
                      fine leak test or 260 Pa (2.0 torr) for a      photomultiplier tube. Gamma radiation
                      gross leak test. The higher venting            pulses from the krypton-85 trapped within
                      pressure leaves a greater amount of gas        a device produce quanta of light through
                      inside of the gross leakers and allows         ionization of the crystal (Fig. 7). The
                      them to be reliably detected. The              quanta of light are converted to current
                      bombing chamber is then vented to              that in turn is read with a rate meter.
                      atmosphere and opened; the devices are
                      removed and taken to the detector station          Typically a reject device will contain
                      and measured for any radiation from            enough krypton-85 gas to produce a
                      internally trapped krypton-85 gas that         minimum of 1000 counts per minute that
                      entered a leaker.                              in turn is about 5 × 1011 molecules of
                                                                     krypton-85 gas within the part. (That
FIGURE 7. Radiation detection system.                                usually represents a krypton-85 partial
                                                                     pressure of parts per million or parts per
Tube                            Lead cover                           billion). The crystals are mounted within
                                                                     a 50 mm (2 in.) lead shield to minimize
                       Lead                                          the atmospheric radiation and keep the
                       donut                                         background reading as low as possible.
                                                                     The time required to achieve a go/no-go
                                                                     signal in a scintillation crystal is 20 to
                                                                     40 ms. Each device configuration is first
                                                                     measured with a counting efficiency in the
                                                                     crystal. The efficiency is identified as a
                                                                     K factor or the measurement of the
                                                                     number of counts per minute per
                                                                     microcurie of krypton-85 gas entrained
                                                                     within that device.
 γ γγ                                                                Sensitivity of Leak Testing
γγ                                                                   with Radioactive
                                                                     Krypton-85
                    γ
 γ                     Lead                                          The sensitivity of leak testing with
 γ γγ γ                shield
Scintillation crystal                                                krypton-85 tracer gas covers the range
Quartz light pipe
                                                                     from a visible hole, to as low as
  Photomultiplier                                                    10–14 Pa·m3·s–1 (10–13 std cm3·s–1).
    Rate meter                                                       Typically production or mass testing
                                                                     applications cover from a visible hole to
                                                                     10–9 Pa·m3·s–1 (10–8 std cm3·s–1). High
                                                                     sensitivities are achieved in some
                                                                     production applications to 10–12 Pa·m3·s–1
                                                                     (10–11 std cm3·s–1), by maintaining a high
                                                                     krypton-85 concentration, bomb times of
                                                                     a few hours and accurate readout.
                                                                     Advantages of Leak
                                                                     Testing with Radioactive
                                                                     Tracer Gas
                                                                     With krypton-85 tracer gas leak tests, it is
                                                                     necessary only to bomb or inject the
                                                                     pressurized tracer gas into the devices
                                                                     under test to measure leakage. By
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contrast, other tracer gas leak testing         Vacuum Decay
techniques require that the tracer gas first    Confirmation of Leak Rates
be forced into the device and secondly
drawn out of the device to permit               The radioactive tracer gas technique using
measurement of the leakage rate. The            krypton-85 gas provides perhaps the most
technique of bombing and not drawing            absolute technique of confirming a leak
the radioactive tracer back out of the          rate. When a leaking device of known
device reduces the probability of missing       internal volume is bombed in krypton-85
leaks because it reduces the chance that        gas, the device will collect a measurable
the leak path will become blocked. Still        quantity of krypton-85 gas. Quantitative
another advantage of this technique of          measurement of the gamma reading
leak testing is that the rate of testing of     provides an accurate measure of the
sealed devices is many times faster than        number of krypton-85 molecules trapped
with other tracer gas techniques.               in the device.
    The beta (electron) emission from the           Because the partial pressure of
krypton-85 can be used to determine             krypton-85 is being measured, the exact
whether tracer gas is adsorbed on the           leak rate may be verified by measuring the
external surface of the test object or is       initial reading of krypton-85, placing the
contained wholly within the interior of         device in vacuum for several hours,
the sealed test object. The radioactive         reading the device and calculating the
emission from krypton-85 is more than           percentage of gas loss by using the
99 percent beta (electron) emission, which      equation Pt = P0 e–kt, where k is the
does not have sufficient particle energy to     measured or calculated leak conductance
penetrate through most enclosure                (cm3·h–1) divided by the internal volume
materials. A beta measurement can be            (cubic centimeter). A typical plot of
made to avoid rejecting those devices           vacuum decay curves is shown in Fig. 8.
with adsorbed external surface tracer gas
only. If beta emission is minimal and           FIGURE 8. Vacuum decay for 20 mm3 (1.2 × 10–3 in.3)Partial pressure (percent)
gamma-ray emissions are observed, they          package of krypton-85 for leaks A to L with range of
indicate the presence of radioactive            conductances (cm3·h–1). One cm3·h–1 = 2.8 × 10–4 cm3·s–1 =
krypton-85 within the enclosure and thus        0.8 oz·day–1.
indicate true leakers. The ratio of beta
emissions to gamma emissions for                       100
externally adsorbed krypton-85 is                        90
typically of the order of 200 to 1. This                 80
ratio drops to the order of 1 to 1 where
external surface adsorbed krypton-85 is                  70
minimal and radiation comes from inside                  60
the test object.
                                                                                                                                                 L
Beta Particle Counting to                                50
Detect Parts with Surface
Contamination                                            40
Routine checking of rejected parts with a                                                                                                   K
thin window Geiger-Müller tube                           30
sometimes reveals surface contamination
of the test parts. Comparison of rejected                                   20               F                                   J
parts with acceptable parts of the same                                                   A         G
surface composition can be used to
determine the significance, if any, of the                                                             HI
surface contamination. Those parts with
significant contamination can often be                                      10                  B CD E
decontaminated with a brief exposure to                                           0          50 100 150 200 250 300 350
heat. Frequently, such a heating cycle is
routinely incorporated into the testing         Legend                                                       Time in vacuum (h)
procedure of certain parts having organic
coatings. It is quite reliable to test painted    A = 3 × 10–7                               G = 6 × 10–8
devices such as relays, by including an           B = 2 × 10–7                               H = 5 × 10–8
empty sample can, painted with the                C = 1 × 10–7                               I = 4 × 10–8
lot-of-relays but without any header or           D = 9 × 10–8                               J = 3 × 10–8
internal components. The can is measured          E = 8 × 10–8                               K = 2 × 10–8
after bombing in the radioactive tracer           F = 7 × 10–8                               L = 1 × 10–8
gas. When the radiation is gone from the
can, the rest of the lot may be measured
for internally trapped krypton-85.
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Accuracy of Radiation                          and K is the counting efficiency of the
Counting Techniques                            device being tested (that is, the efficiency
                                               of measuring one microcurie of
With fixed conditions of bombing               krypton-85 gas within the geometry of
pressure, exposure time and concentration      the exact part being tested, that will
of radioactive krypton tracer, accuracy is     provide a correction for the thickness of
limited by the efficiency of radiation         the walls of the device as well as the
detection, assuming no external surface        positioning of the device relative to the
adsorption of the gas. Small parts can be      scintillation crystal detector used to
counted in a well or tunnel shaped             measure the radioactive tracer gas trapped
thallium activated sodium iodide crystal       in the device).
scintillation counter. A state-of-the-art
scintillation crystal counting station         Functional Check on
operates with a background count of 1000       Krypton-85 Counting
to 1500 counts per minute from                 Station
atmospheric radiation.
                                               The counting station used, for the
    Detection of a device that has been        detection of reject devices after bombing,
bombed in radioactive krypton gas will         is checked for function at least once per
collect a quantity of krypton-85 that reads    day. That check consists of placing a
1000 to 1500 counts per minute above           krypton-85 glass reference vial into the
background. (Note that it is rare for          scintillation detector and ensuring that
leakers to be found that are marginal).        the amount of krypton-85 within that vial
Each increment of 1000 to 1500 counts          is being detected by the crystal rate meter
per minute usually represent a leakage         system. A tolerance of ±10 percent is
rate of one tenth of an order of               acceptable for such a check. In a well type
magnitude                                      crystal detector, the efficiency of detection
                                               is about 14 000 counts per minute per
    Such quantities of krypton-85 are quite    microcurie of krypton-85.
accurately measured with state of the art
equipment. A device that leaks in the fine         A becquerel (Bq) is one disintegration
leak range, <5 × 10–7 Pa·m3·s–1                per second whereas a curie (Ci) is a
(<5 × 10–6 atm cm3·s–1), can be measured       quantity of disintegrations per second:
to accuracies of 0.1 of an order of            37 GBq = 1 Ci.
magnitude, plus the normal cumulative
errors associated with the process: i.e. the   Counting Station Calibration
gas concentration, the pressure
measurement, the krypton-85 reference          The counting stations are normally
sources etc. Thus a device may be              calibrated monthly by using a traceable
measured for leakage with an absolute          krypton-85 glass reference source
accuracy of about 0.4 of one order of          corrected for half life decay. Because the
magnitude.                                     beta detectors are classified as qualitative
                                               instruments, they are normally checked
Equation Used for Radioactive Gas              for function only by using a cesium-137
Leak Testing                                   source (or other beta source) and verified
                                               to be functional, because in the testing of
Equation 1 is used for the calculation of      devices they are normally used as a
the testing parameters in performing a         go/no-go indicator of surface gas
radioactive tracer gas leak test:              contamination. The scintillation crystals,
                                               however, require a determination of
(1)  Q1 =      R                               accurate detectability for krypton-85 and
           S K Pd T                            assurance of stability. The rate meter used
                                               to measure the signal from the
where Q1 is the leak rate sensitivity          scintillation crystal can be calibrated
desired (Pa·m3·s–1); R is the reject point or  electronically by using a pulse generator
                                               to verify signal detection accuracy and
rate meter reading above background, at        linearity, following manufacturer’s
                                               procedures.
which a part is rejected (this net reading
                                                   The functional accuracy of the rate
should be at least equal to the normal         meter is best determined as a crystal rate
                                               meter system. The operational stability of
ambient background reading of the              the crystal rate meter system must first be
                                               established by placing a krypton-85
counting equipment, typically 1200 to          reference vial into the crystals normal
1500 counts per minute net); Pd = Pe2 – Pi2    geometric reading position, as a device
(where Pe is the external absolute pressure    would be placed into a well type crystal for
and Pi is the internal absolute pressure, in   measurement.
pascal); S is the specific activity or
concentration of the radioactive gas
mixture (this concentration measurement
is normally measured at least monthly) in
Bq·Pa–1·m–3 (or µCi·atm cm–3); t is
pressurization or bombing time (second);
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Most crystals operate at a high voltage                    efficiencies of 13 000 to 14 400 counts per
of 1 to 1.5 kV. To establish the point of                      minute per microcurie.
stability, the voltage is reduced to 0 and
then increased in increments of about                              In large volume manufacturing
100 V, with the reading of the reference                       facilities, the devices in test are read
source being recorded at each 100 V. A                         automatically by using a conveyor belt
properly operating crystal will                                that carries the device through a tunnel in
demonstrate a stable range over perhaps                        a scintillation crystal. That allows the
several hundred volts. That point is                           radiation from a device to be read
considered the plateau of that crystal.                        circumferentially as the device passes
Such a plateau can be seen in Fig. 9. The                      through the detector. Because only 20 to
high voltage is then set to a point that is                    40 ms are required to detect krypton-85
usually at the midpoint of the plateau. In                     within a device, the belt may carry
state-of-the-art counting system                               devices at speeds of 175 to 225 mm (7 to
equipment, the system should remain                            9 in.·s–1). A calibration of such detection
stable at that voltage setting for years,                      systems requires the reference standard to
without any significant changes to the                         be measured with the tunnel detection
efficiency of the system.                                      zone in a static state, the plateau to be
                                                               established, the efficiency to be
    The resultant reading of the standard at                   determined (as with the well crystal case
that voltage, minus the background                             above) and then the measurement to be
reading taken without the reference                            read with the conveyor belt operating at
source in the well, will provide the actual                    full speed. Obviously, the dynamic
efficiency of the crystal to measure                           efficiency of the system will be less than
krypton-85 gas contained in a reject                           static. Tunnel systems achieve dynamic
device in that position within the crystal.                    efficiencies from 8000 to 11 000 counts
A good quality crystal will provide reading                    per minute per microcurie, for most
                                                               devices.
FIGURE 9. Typical operating plateau for scintillation counter instrument. Detector sensitivity
equals counts per second per nanobecquerel (counts per minute per microcurie).
             62 (100)
                                           56 (90)
Counts per s·kBq–1 (counts per min·nCi–1)  49 (80)
                                           43 (70)
                                           37 (60)             Noise level
                                           31 (50)
                                                    Set point
                                           25 (40)
                                           19 (30)
                                           12 (20)             Plateau
                                            6 (10)
                                           0
                                                               0.7 0.8 0.9 1.0 1.1 1.2 1.3 1.4
                                                                                      Adjustments (kV direct current)
                                                                                                                         Leak Testing of Hermetic Seals 571
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Determination of Counting                       pressure of 0.7 to 1.0 MPa (7 to 10 atm).
Efficiency for Hermetic                         The concentration required to perform a
Devices                                         proper test, is not critical. The
                                                concentration for testing plastic devices,
The efficiency of measurement of a              and painted devices is usually maintained
quantity of krypton-85 gas within a             quite low, < MBq·Pa–1·m–3 (< 0.1 mCi·std
hermetic device requires a representative       cm–3). The concentration for testing
sample of the device to be tested, to be        nonabsorbent devices, high reliability
filled with a known quantity of                 devices etc., are usually > 1 MBq·Pa–1·m–3
krypton-85 gas and then to be placed            (> 0.1 mCi·std cm–3).
within the scintillation crystal in exactly
the same position as it will be measured            The specific activity measurement is
when tested. The sample used for the            normally performed once each month.
actual efficiency measurement must be of        Two methods are commonly used with
the same geometry, material and internal        radioactive tracer gas systems. In one
void as the actual parts to be tested with      technique the gas mixture is sampled by
the radioactive gas.                            withdrawing a sample of the gas into a
                                                glass vial, at a pressure of 250 Pa (2 torr).
    Several techniques have been used to        The volume of the glass vial must be
establish the counting efficiency of            precisely known and is usually about
devices to be tested. A rather complicated      3 mL = 3 cm3 (0.18 in.–3). The sample of
technique involves the introduction of a        gas is measured in a scintillation crystal
very accurately known quantity of               and then compared to the measurement
krypton-85 gas, of accurately known             of a similar geometry glass reference vial
concentration, through a tubulation that is     of known quantity of krypton-85. The
then sealed off. The device is then placed      concentration of krypton-85 in
within the crystal and measured for             µCi·std cm–3 is calculated as the specific
detection efficiency, referred to as K factor.  activity of the radioactive tracer gas
That is the measurement of the number of        system. A number of errors are inherently
counts per minute per microcurie of             associated with this technique: the
krypton-85 gas within that device.              volume of the vial, the pressure of the
                                                sample, the accuracy of the counting
    A second technique of determination         station, the accuracy of the reference vial
involves the introduction of a sample of        and the human errors introduced by the
material that contains an accurately            technician.
known quantity of krypton-85 gas. The
device is then assembled into its final             The second technique is a closed loop
configuration and measured in the crystal.      system built into the radioactive tracer gas
Both of these techniques are best               handling system, which automatically
performed by the radioactive gas                samples the gas in the system every cycle
equipment manufacturer. The equipment           that the machine operates. The
manufacturer can usually provide the user       concentration is electronically calculated
with the K factor for most devices that are     and displayed on the operating control
manufactured, based on prior                    panel of the system. It involves the
experiments, and geometric approximation        automatic sampling of the gas into a
of the device within a crystal. One rule is     large, fixed volume chamber, at a pressure
that the nuclear physics of krypton-85 gas      above atmosphere, and the continuous
only provides sufficient emission to            measurement of that sample with an
achieve a maximum reading of 1.6 × 104          integral radiation detector. The error
counts per minute per microcurie of             associated with this technique is usually
krypton-85. Any indications of greater          < 0.001 of the hand sampling technique
efficiencies are ambiguous and indicate         and is automatically performed every
errors in the technique or equipment used       cycle of operation.
to determine the K factor.
                                                Calculating Leak Rates of
Determining Specific                            Failed Devices
Activity of Radioactive
Krypton-85 Tracer Gas                           Following the bombing of the devices and
Mixture                                         sorting of rejects, the actual quantitative
                                                leak rates may be calculated for devices.
The concentration of the krypton-85             Leak rate values greater than 5 × 10–8
radioactive gas mixture used for                Pa·m3·s–1 (5 × 10–7 std cm3·s–1), are
pressurization of the hermetic devices,         considered to be viscous flow of the gases
must be accurately known to calculate the       and the gases of concern in leak detection
proper bomb time and pressure to be             systems are considered to have similar
used. The krypton-85 gas is normally            flow rates through the same leak path.
mixed in nitrogen (or air) at a total           Smaller leak rates are considered to be in
                                                the molecular flow regime. The leak rates
                                                are calculated based on the net radiation
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reading obtained on the device. Normally       using standard half life equations or
devices are rejected on a go/no-go basis.      corrections from decay tables. The normal
However, if the quantitative leakage value     accuracy of such standards is ± 10 percent.
is desired on a device, the device should      The reference vials should be corrected for
be read with the rate meter in the long,       half life decay at least every six months by
time constant position. That is, the actual    using the decay equation:
reading of the device is averaged over a
period from 1 to 10 s to ensure an             (2)  At  =  A0  e −0.693   t
accurate reading.                                                        Th
    The ambient background of the              where At = amount of krypton-85
equipment should also be read with equal       remaining at time t; A0 = original amount
accuracy and subtracted from the gross         at time 0; t = time passed from time 0 to
reading. The leak rate of the device is
calculated by dividing the net reading by      time t (in unit of year); T1/2 = half life of
the reject value used in Eq. 1, times the      krypton-85 = 10.76 yr. This half life decay
test sensitivity Q1. The leak rate value
obtained will be for krypton-85 gas. If it is  calculation has been converted to a decay
desired to convert a leak rate less than
5 × 10–8 Pa·m3·s–1 (5 × 10–7 std cm3·s–1) to   chart as shown in Table 5. From that chart
an equivalent leak rate for another gas
such as air or helium, the krypton-85 leak     the quantity of krypton-85 within the vial
rate would be converted based on the
theory that the flow rate varies inversely     can be calculated easily and accurately.
with the ratio of the square roots of the
molecular weights of the two gases of          Pressurization System
concern. Thus, to convert the krypton-85       Calibration
leak rate to air, multiply by 1.712; to
convert it to helium, multiply by 4.7.         The pressurization systems require
                                               maintenance and calibration at specific
    It should be remembered that the           intervals to satisfy the metrology needs
actual leak rate of the device may be          and to maintain a gas handling system
confirmed by applying techniques for           required to reliably handle radioactive gas.
vacuum decay confirmation of leak rates,       The maintenance cycle includes
described earlier.                             replacement of valve seals, vacuum pump
                                               oil, compressor oil and normal wear
Krypton-85 Reference                           items. The calibration steps cover the
Source for Calibration                         vacuum gages, pressure transducers and
                                               mechanical gages that control the actual
The krypton-85 reference calibration is        test parameter accuracies. Most vacuum
conducted by using a reference standard        and pressure gages are reliable for periods
in the form of a glass vial of about           of one year. The vacuum gages are
3.5 cm3 (0.2 in.3) volume, with a quantity     calibrated at the critical stepping points of
of krypton-85 gas sealed inside and            0.066, 0.266 and 100 kPa (0.5, 2.0 and
traceable to the United States National        760 torr). The pressure transducers are
Institute of Standards and Technology.         calibrated against a traceable mechanical
The half life of krypton-85 is 10.76 years,    gage for the normal operating range of
which allows for accurate correction by        the pressurization system.
TABLE 5. Decay of krypton-85 with half life of 10.76 yr.
  Years ______________________________________________M__o_n_t_h_s_____________________________________________
                 0 1 2 3 4 5 6 7 8 9 10 11
     0 1.000 0.995 0.989 0.984 0.979 0.974 0.968 0.963 0.958 0.953 0.948 0.943
     1 0.938 0.933 0.928 0.923 0.918 0.913 0.908 0.903 0.898 0.893 0.889 0.884
     2 0.879 0.874 0.870 0.865 0.860 0.856 0.851 0.847 0.842 0.838 0.833 0.829
     3 0.824 0.820 0.816 0.811 0.807 0.802 0.798 0.794 0.790 0.785 0.781 0.777
     4 0.773 0.769 0.765 0.761 0.756 0.752 0.748 0.744 0.740 0.736 0.733 0.729
     5 0.725 0.721 0.717 0.713 0.709 0.705 0.702 0.698 0.694 0.691 0.687 0.683
     6 0.679 0.676 0.672 0.669 0.665 0.661 0.658 0.654 0.651 0.647 0.644 0.641
     7 0.637 0.634 0.630 0.627 0.624 0.620 0.617 0.614 0.610 0.607 0.604 0.601
     8 0.597 0.594 0.591 0.588 0.585 0.582 0.578 0.575 0.572 0.569 0.566 0.563
     9 0.560 0.557 0.554 0.551 0.548 0.545 0.542 0.539 0.537 0.534 0.531 0.528
    10 0.525 0.522 0.520 0.517 0.514 0.511 0.509 0.506 0.503 0.500 0.498 0.495
    11 0.492 0.490 0.487 0.485 0.482 0.479 0.477 0.474 0.472 0.469 0.467 0.464
                                                                                                                         Leak Testing of Hermetic Seals 573
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PART 5. Fine Leak Testing of Hermetically
Sealed Devices with Helium Gas
Helium Fine Leak Test                          leakage rates in the range from about 10–7
Methods for Hermetically                       to about 10–11 Pa·m3·s–1 (about 10–6 to
Sealed Electronic Devices                      about 10–10 std·cm3·s–1). The free volume
                                               of the evacuated test chamber containing
The helium tracer gas leak test technique      the devices under test should be held to a
is the second of two widely used               practical minimum level. Any empty
techniques for fine leak testing of            space within the chamber has an adverse
hermetically sealed electronic devices. The    effect on the limits of leakage sensitivity
helium mass spectrometer fine leak test is     attainable with the helium mass
relatively simple and does not require         spectrometer during leak tests of sealed
compliance with regulations governing          devices with small internal helium filled
nuclear byproducts that produce ionizing       volumes.
radiations (such as krypton-85 tracer gas).
                                               Operational Limitations of Helium
    Helium is the lightest inert gas. Its      Back Pressure Leak Tests
molecules will penetrate through even the
smallest leaks but will not clog the leak.     When the sealed test devices are placed in
Helium is not hazardous and is present in      the evacuated chamber for leak testing,
the earth’s atmosphere only as a tracer        any helium gas previously injected into
element present in a concentration of          each sealed device may or may not have
about 5 µL·L–1 of air (about 1 part in         escaped through leaks in their enclosure.
201 000 in air). In normal production leak     This can affect the leakage rate indicated
testing, the mass spectrometer leak test       by the mass spectrometer leak detector.
equipment provides capabilities for            The number of sealed devices that are
detecting leakage rates in the range from      removed in each lot from the (bombing)
about 10–6 to 10–10 Pa·m3·s–1 (10–5 to 10–9    chamber for leak testing should be limited
std cm3·s–1).                                  to a quantity that can be helium leak
                                               tested within a limited dwell time
    With gross leakers it is possible that so  (typically 30 to 60 min maximum).
much tracer gas may escape before mass
spectrometer leak tests of the devices that        Devices that are gross leakers can lose
little or no tracer gas is left to escape      essentially all of their contained helium
during the actual leak test period. Such       tracer gas by leakage into air or vacuum
loss of contained tracer gas makes leak        environments in very short time periods.
detection much less reliable.                  These could be missed entirely if the
                                               helium leak test were used alone during
Principles of Helium Fine                      inspection. Thus, gross leakers should be
Leak Test Operation                            separated from each lot of sealed test
                                               devices by gross leak tests (described
In leak tests, the helium tracer gas is        above).
introduced into the devices under test
either (1) initially during device                 Lack of repeatability in helium fine
manufacture just before or during the          leak testing of sealed devices can occur
hermetic sealing process or (2) by back        because, in most cases, the actual quantity
pressure (bombing) techniques applied          of helium contained within each
any time after the hermetic sealing of the     component (assuming that it is a leaker) is
device has been completed. The tracer gas      not known and cannot be calculated. (By
may vary from commercially pure                comparison, with radioactive krypton-85
100 percent helium to a mixture of             tracer gas of known concentration in
10 percent helium with 90 percent              nitrogen, the quantity present within the
nitrogen (if pressuring up is to be used       sealed test device is measured directly by
and the cost of helium is a deterrent to its   scintillation or Geiger-Müller counter
use). During tests, the sealed devices are     radiation measurements.) Thus, it is
placed in a test chamber that is evacuated     possible to calculate the true leakage rate
and connected to a properly calibrated         by helium leak tests only if an appropriate
helium mass spectrometer leak. With            theoretical relationship is available to
proper calibration, the helium mass            relate internal gas pressure to the
spectrometer leak detector can detect          conditions of bombing and the delay
                                               between device removal from bombing
                                               pressure and its actual measurement of
                                               helium leakage with the mass spectrometer.
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This correlation between measured         shift to verify that the specified amount
leakage rate and prior bombing conditions     of helium tracer gas is actually being
and subsequent time delays depends on         sealed within each package. Within a
knowledge of the following critical           maximum transfer time of 30 min after
factors: (1) the mechanism of helium gas      completion of the package sealing
flow into the sealed test object during       operation, the device under test is
pressurization or bombing; (2) the            transferred into a chamber connected to
pressure differential applied across the      an evacuating system and a helium mass
sealed boundary of the device enclosure       spectrometer leak detector. Any tracer gas
during bombing; (3) the time of               that leaks out is indicated by the leak
pressurization and external pressure of       detector as the measured leakage rate R1.
helium used during bombing, as well as        This measured leakage R1 is converted to
the degree of vacuum (or internal gas         the equivalent standard leakage rate:
pressure) existing within the device when
bombing occurs; (4) the internal free         (3)  Q  =  R1   Pi
volume of the sealed device to be tested;                    PHe
(5) the unfilled free volume in the
evacuated test chamber while the test         where Q is the equivalent standard
devices are contained in it; (6) the dwell
time or delay between completion of           leakage rate defined as that quantity of
pressurization during bombing and the         dry air at 25 °C (77 °F) in Pa·m3·s–1
time at which helium leakage
measurements are made (also significant       flowing through one or multiple leak
is the external gas pressure during dwell
time, that is, the atmospheric air pressure   paths when the high pressure side is at
or vacuum chamber pressure); (7) the
leakage flow mechanism (molecular,            100 kPa (1 atm) and the low pressure side
viscous etc.) during the dwell time delay
and the period of actual leakage              is at a pressure not greater than 130 Pa
measurement; (8) the actual helium
concentration in nitrogen or air existing     (1 torr absolute); where the standard
within the sealed test device at the
completion of the bombing period.             leakage rate is expressed in units of
                                              Pa·m3·s–1 (or optionally, in std cm3·s–1);
    The concentration could vary if mixed
tracer gas (helium plus nitrogen) is          where R1 is measured leakage rate defined
injected into an evacuated test device        as the leakage rate of a given package
during bombing or if 100 percent helium
tracer gas is injected into sealed devices    measured under specific conditions and
that already contain a significant air
pressure (if previously stored in air or not  using a specified (tracer gas) test medium;
subjected to evacuation before helium
bombing).                                     where Pi is total absolute internal gas
                                              pressure within the sealed device in pascal
    Most leak testing documents used as
helium leak testing standards or              (or torr or bar); and where PHe is internal
specifications for back pressure leakage      partial pressure of helium within test
testing are based on the assumption that
leakage occurs in the molecular flow          device, in the same pressure units as
region and obeys simple exponential
relationships, as indicated in Eq. 4 below.   selected for Pi.
                                                  In many specifications, electronic
Helium Fine Leak Testing
of Devices Filled with                        devices with an internal cavity volume of
Helium during                                 0.1 cm3 (0.006 in.3) or less are rejected if
Manufacture
                                              the equivalent standard leakage rate Q
The fine leak testing technique described     exceeds 5 × 10–8 Pa·m3·s–1 (5 × 10–7 std
here may be used for sealed electronic        cm3·s–1). Devices with an internal cavity
device packages that have been enclosed       volume greater than 0.1 cm3 (0.006 in.3)
in such a fashion as to ensure that the
internal cavity of the package contains a     are rejected if the equivalent standard
helium tracer gas content that provides a     leakage rate Q exceeds 5 × 10–7 Pa·m3·s–1
minimum of 20 kPa (0.2 atm) absolute          (5 × 10–6 std cm3·s–1).
partial pressure of tracer gas (100 percent
helium) at a standard temperature of          Fixed Helium Tracer Gas
25 °C (77 °F). A sampling inspection          Fine Leak Test Technique
should be conducted on each 8 h work
                                              In the fixed technique for fine leak testing
                                              of sealed devices with helium tracer gas,
                                              the sealed electronic devices are leak
                                              tested under specific bombing time and
                                              testing time conditions specified for each
                                              size of internal device cavity (Table 6).
                                                  The bombing time is the time the
                                              devices are exposed to 99.5 to 100.0
                                              percent pure helium tracer gas under the
                                              pressure of about 400 kPa for 2 h or a
                                              pressure of about 200 kPa for about 4 h.
                                              The maximum dwell time is the
                                              maximum time allowed after release of
                                              the bombing pressure, before the leakage
                                              is measured from the sealed device under
                                                                                                                                              Leak Testing of Hermetic Seals  575
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test. This fixed technique is not used if             accordance with an inverse exponential
the maximum standard leakage rate limit               relationship:
given in procurement documents is less
than the limits specified for the flexible                                                       −Qt1 MA 
helium leak testing technique (described
next).                                                (4)       P = PE 1 − e V P0                           M
                                                                                                                    
Flexible Helium Tracer Gas
Fine Leak Test Technique                                  During the dwell time following
for Hermetic Seals                                    bombing, the rate of leakage of helium
                                                      tracer gas from leaking devices is assumed
In the flexible helium fine leak test, the            to follow a typical exponential decay
sealed electronic devices to be tested are            transient:
subjected to a bombing pressure whose
minimum level is 300 kPa (3 atm) of                   (5)       R1 =                            Q PE  MA
helium pressure. Values of bomb pressure,                                                        P0   M
bombing exposure time and dwell time
after bombing before leak testing are                                −Qt1                                      MA 
chosen so that actual measured tracer gas                       × 1 − e V P0                                M
leakage rates for anomalous devices will
be greater than the minimum detection                                                                               
sensitivity capability of the helium mass
spectrometer leak detector. If the dwell                                 −Q t2                        MA
time exceeds 60 min, graphs are plotted                                                               M
to determine an actual leakage rate R1                          × e V P0
value that will ensure overlap of leakage
rates with those detectable with the gross            where R1 is measured leakage rate of tracer
leak test technique selected for                      gas, helium, through the leak (Pa·m3·s–1);
subsequent tests of all devices.
                                                      Q is equivalent standard leakage rate in
    For each combination of (1) sealed
package internal free volume V,                       the same units as R1; PE is pressure of
(2) bombing pressure PE to which devices              exposure in pascal (or in a unit called
are exposed, (3) bombing time t1,
(4) dwell time t2 following bombing and               atmosphere [atm] = 101.325 kPa); P0 is
before leak testing and (5) maximum                   atmospheric pressure in the same unit as
allowable equivalent standard rate Q
(specified in procurement documents),                 PE ; MA is molecular weight of air = 28.7
theoretical relationships are used to                 g·mol–1; M is molecular weight of the
calculate the rejection limit of the actual           tracer gas, helium = 4 g·mol–1; t1 is time of
measured leakage rate R1 by Eq. 4                     exposure to PE (second); t2 is the dwell
described next.                                       time between release of pressure and leak
Exponential Equations                                 detection; and V is internal volume of the
Assumed for Bombing and
Leakage Transients                                    device package cavity (cubic meter).
During the bombing operation, the                     Criteria for Rejection of
pressure of helium tracer gas within the              Leakage Devices in Flexible
hermetically sealed device enclosure (if it           Helium Leak Test
is a leaker) is assumed to increase in
                                                      Unless otherwise specified, devices with
                                                      an internal cavity volume of 0.01 cm3
                                                      (6 × 10–4 in.3) or less are typically rejected
                                                      if the equivalent standard leakage rate Q
                                                      exceeds 5 × 10–9 Pa·m3·s–1 (5 × 10–8
                                                      std cm3·s–1). Devices with an internal
                                                      cavity volume greater than 0.01 cm3
                                                      (6 × 10–4 in.3) and equal to or less than
TABLE 6. Fixed technique for leak testing of sealed devices by using helium tracer gas.
Internal Cavity Package Volume, cm3 (in.3)  ________B__o_m__b_in__g__C_o_n_d__it_io__n________          Dwell            _______R__e_je_c_t__L_im__i_t_______
                                                                                                      Time (h)           Pa⋅m3⋅s–1 (std cm3⋅s–1)
                                            _______P_r_e_s_s_u_r_e_______ Bombing
                                               kPa (lbf⋅in.–2) Time (h)
≤ 0.01 (≤ 6.1 × 10–4)                       515 ± 15  (60 ± 2)  2.0 to 2.2                            1                  7 × 10–10                      (7 × 10–9)
  0.01 to 0.40 (6.1 × 10–4 to 2.44 × 10–2)  515 ± 15  (60 ± 2)  2.0 to 2.2                            1                  2 × 10–10                      (2 × 10–9)
                                            515 ± 15  (60 ± 2)  2.0 to 2.2                            1                  2 × 10–9                       (2 × 10–8)
≥ 0.40 (≥ 2.44 × 10–2)                      310 ± 15  (30 ± 2)  2.0 to 2.2                            1                  1 × 10–9                       (1 × 10–8)
≥ 0.40 (≥ 2.44 × 10–2)
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0.4 cm3 (0.024 in.3)are typically rejected if
the equivalent standard leakage rate Q
exceeds 1 × 10–8 Pa·m3·s–1 (1 × 10–7
std cm3·s–1).
    Devices with an internal volume
greater than 0.4 cm3 (0.024 in.3) may be
rejected if the leakage rate Q exceeds
1 × 10–7 Pa·m3·s–1 (1 × 10–6 std cm3·s–1).
Simplified Equation for
Calculation of Leakage Rates after
Helium Bombing
The quantity √(MA·M–1) = √(28.7/4) = 2.7,
so Eq. 5 can be simplified as Eq. 6:
(6)  R   =  2.7  Q PE         −2.7 Q t1  
                             1− e V      
                 P0                     
                 −2.7 Q t 2
         ×e V
    In a similar way, the actual leakage rate
for a device that has been filled with
helium to the pressure P during
manufacture can be found from the
simplified Eq. 7:
(7)  R1  =  2.7 Q PE          −2.7 Q t 2
                 P0
                             eV
                                                                                                                                              Leak Testing of Hermetic Seals  577
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References
                       1. American Vacuum Society Glossary of
                           Terms Used in Vacuum Technology. New
                           York, NY: Pergamon Press (1958):
                           p 6.34, 6.39.
                       2. Hayes, R.A., F.M. Smith, W.A. Smith
                           and L.J. Kitchen. Development of High
                           Temperature Resistant Rubber
                           Compounds. Wright Air Development
                           Center Technical Report 56-331.
                           Ft. Belvoir, VA: Defense Technical
                           Information Center (February 1958).
                       3. Roth, A. Vacuum Sealing Techniques.
                           New York, NY: Pergamon Press (1966).
                       4. Neff, G.R. Hermetically Sealed Devices
                           for Leak Detection. United States Patent
                           5 452 661 (September 1995).
                       5. Tyson, J. “Optical Leak Testing: A New
                           Method for Hermetic Seal Inspection.”
                           1991 ASNT Spring Conference:
                           Nondestructive Characterization for
                           Advanced Technologies [Oakland, CA].
                           Columbus, OH: American Society for
                           Nondestructive Testing (March 1991):
                           p 182-186.
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15
                                                                   CHAPTER
                    Leak Testing Techniques
                     for Special Applications
                                                                                 Charles N. Sherlock, Willis, Texas
                                                                                 John F. Beech, GeoSyntec Consultants, Atlanta,
                                                                                 Georgia (Part 3)
                                                                                 Glenn T. Darilek, Leak Location Services, Incorporated,
                                                                                 San Antonio, Texas (Part 3)
                                                                                 James P. Glover, Graftel, Incorporated, Chicago, Illinois
                                                                                 (Part 2)
                                                                                 Daren L. Laine, Leak Location Services, Incorporated,
                                                                                 San Antonio, Texas (Part 3)
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PART 1. Techniques with Visible Indications of
Leak Locations1
Purposes of Leak Testing                       1. Leak location techniques independent
to Locate Individual Leaks                         of any characteristic properties of the
                                                   tracer gas include those that use, for
Leak testing for the purpose of locating           example, candles, liquid and chemical
individual leaks is required when it is            penetrants, bubble testing and sonic
necessary to detect, locate and evaluate           or ultrasonic leak tests.
each leak. Unacceptable leaks then can be
repaired and total leakage from a vessel or    2. Leak location techniques involving use
system brought within acceptable limits.           of tracer gases with easily detectable
Methods for detecting and locating                 physical or chemical properties
individual leaks are generally quantitative        include gases with thermal
only in the sense that the lower limit of          conductivities or chemical properties
detectable leak size is determined by the          differing from those of the
sensitivity of the leak detecting indicators       pressurizing gas, for example, gaseous
and test methods used. Thus, only rather           halogen compounds and gases having
crude overall leakage rate information             characteristic radiation absorption
could be approximated by adding the                bands in the ultraviolet or infrared
leakage rates measured for the detectable          spectral ranges.
leaks.
                                               3. Leak location techniques involving
    Many different leak detecting, locating        tracer gases with atomic or nuclear
and measuring techniques and devices are           properties providing easily detectable
available. The selection of test equipment,        leak signals include helium and other
tracer gas and leak detection method is            inert gases having specific
influenced by the following factors:               charge-to-mass properties that permit
(1) the size of the leaks to be detected and       their sensitive detection by mass
located; (2) the nature and accuracy of            spectrometers and include gaseous
leak test information required; (3) the size       radioactive isotopes detectable with
and accessibility of the system being              particle counters and radiation
tested; (4) the system operating                   detectors.
conditions that influence leakage; (5) the
hazards associated with specific leak         Techniques for Leak
location methods; and (6) the ambient         Location with Dyed Liquid
conditions under which leak location tests    Tracers
are required to be carried out. Wind,
stratification effects and lack of air        Testing for leaks by use of dyed liquid
circulation can influence leak sensitivity    tracers is a nondestructive testing process
and personnel.                                closely related to the liquid penetrant
                                              testing process used to detect
Classification of Methods                     discontinuities open to the surface in test
for Locating and                              objects. For leak testing, however, the
Evaluating Individual Leaks                   liquid penetrant is applied to one side of
                                              the enclosing wall of a test object or test
Methods for locating and evaluating           system and, after allowing adequate time
individual leaks can be categorized in        for the penetrant to seep through leaks,
various ways, including by types of leak      visual testing for leak location is carried
tracer used in the detection, location and    out on the opposite side of the enclosure
possible measurements of individual leaks.    wall. Note that, in this type of test,
A primary division is that between liquid     pressurization of the test object is not
tracers and more sensitive gaseous tracers.   usually required. The migration of the
Leak location techniques that depend on       liquid tracer through the leak passageway
tracer gas properties are listed below in     is not due to an applied pressure
general categories, in order of increasing    differential. Instead, the physical forces
leak sensitivity and complexity of test       required to cause the liquid to penetrate
techniques.                                   through the leak are provided by surface
                                              wetting capillary action and by surface
                                              tension effects characteristic of the liquid
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penetrant tracer and of the material           more. Color former dyes are materials used
surfaces that this tracer touches.             mainly in combination with sensitizer
                                               dyes for the purpose of shifting the color
    Significant differences exist between      response by cascading the fluorescence.
liquid tracers used in leak testing and        Color former dyes, when used alone,
liquid penetrants used for detection of        usually do not provide an acceptable level
surface discontinuities in test objects.       of thin film response but are sometimes
These differences exist mainly in              extremely effective as bulk fluorescence
connection with the way applicable             tracers. The classification of dyes used in
indicator dyes are used, their                 fluorescent tracers follows: (1) water
concentrations and the techniques for          soluble sensitizer dyes, (2) water soluble
augmenting the detectability of leak           color former dyes, (3) oil soluble sensitizer
indications.                                   dyes and (4) oil soluble color former dyes.
Characteristics of Liquid Tracers              Advantages of Water Phase
for Locating Leaks                             Fluorescent Leak Tracers
Liquid leak tracers are typically composed     Water is the most plentiful and the least
of a vehicle or carrier such as oil or water   expensive solvent liquid available. Where
and of a tracer dye system incorporated
into the liquid carrier to enhance visibility  FIGURE 1. Leak testing using fluorescent tracer liquids:
of leakage indications. The dye solubility     (a) fluid is added to air conditioning system; (b) ultraviolet
in various carrier liquids as well as the      radiation causes leaking fluid to fluoresce.
coloration power of the dyes in dilute or      (a)
in concentrated solutions in the carriers
become important factors that control the      (b)
sensitivity and ease of use of the liquid
tracers. Nonfluorescent visible color dyes
that may exhibit intense coloration in
concentrated solutions usually lose their
coloration power rapidly as they are
extensively diluted in a solvent. For water
base tracers, basic dyes provide the most
intense colors. Solvent dyes usually yield
the strongest colors for oil soluble tracer
systems.
    However, a fluorescent dye that has a
reasonable efficiency in the conversion of
ultraviolet radiation to visible light is
usually much more effective as a leak
tracer than is the average visible color
dye. This occurs partly because of the
greater response of fluorescent dyes in
dilute solutions and partly because of the
enhanced visibility or brightness contrast
of fluorescent leak indications seen
against a dark background (see Fig. 1). In
closeup applications where leak testing
can be carried out with an ultraviolet
lamp under subdued white light
conditions, it is often possible to get
brightness contrast values for fluorescent
leak indications that exceed several
hundred to one. These conditions provide
high levels of tracer sensitivity and
excellent visibility of the leak indications.
Components of
Fluorescent Tracer Dyes
Two broad categories are used in
classifying fluorescent dyes with respect to
their effectiveness in tracer usage in leak
testing. Sensitizer dyes are materials that
can yield strong fluorescent response in
thin liquid films and at practical dye
concentrations of about 0.5 percent or
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the use of water as a tracer carrier is       Solvent Developers to Enhance
permissible, economic considerations          Leak Indication of Water Phase
alone would call for its use. Other           Fluorescent Tracer
considerations in favor of water include
cases where water would ultimately be         A useful technique for detecting points of
used as the contained liquid in a tank or     leakage in boilers, pipelines and valves
pipeline being tested. In such cases, the     uses a water phase fluorescent tracer
use of an oil phase tracer liquid would be    containing a special dye system that can
undesirable in view of the necessity for      be developed by application of a suitable
cleaning the oily tracer liquid off the test  spray solvent developer material. This
surfaces before letting water in. When the    process will work if a water activated color
mode of bulk fluorescence is used in leak     dye such as fluorescein, a water soluble
testing, water phase tracers are often        fluorescent dye, is used. However,
preferred. With water phase leak tracers,     fluorescein yields indications having
the fluorescence response can be detected     brightness response much lower than that
at dye concentrations on the order of a       of more efficient sensitizer dyes.
few parts per million or less. This level of
leak (dye) sensitivity is greater by several      In this leak locating technique, the
orders of magnitude than the sensitivity      fluorescent tracer dye is dissolved in
attainable with oil phase tracer materials.   water, this fluorescent water is introduced
                                              into the system under test and the system
Applications of Water                         is pressurized. If necessary, the test system
Phase Fluorescent Leak                        is allowed to stand under pressure for
Tracers in Leak Testing of                    several days. Then a liquid solvent
Boilers and Tanks                             developer is sprayed lightly over the
                                              external surfaces, with particular attention
Water phase fluorescent racers are            to joints, weldments and other regions
frequently used for detecting microleaks      where leaks might occur. Inspection is
in water or steam systems. In this use,       carried out in darkness or under subdued
water containing a dissolved fluorescent      white light while the fluorescence is
tracer dye is introduced into the boiler,     excited with ultraviolet radiation (similar
tank or system under test. The outside of     to those widely used in fluorescent liquid
the test object is then inspected in near     penetrant testing for discontinuities in
ultraviolet radiation (365 nm wavelength      test objects).
mercury vapor radiation) for locations of
points of leakage. In the case of large           Microtraces of dye accumulations at
tanks, it is often found that leaks will      points of leakage will dissolve in the thin
show up only when the large tank is filled    coating of developer liquid applied to
with water. In this case, the filled tank is  surfaces under inspection. These minute
subject to the stresses of weight and         amounts of fluorescent tracer dye
hydrostatic pressure incurred in normal       dissolved in the developer can then
usage of the tank. Stress may act to open     undergo a transition, from the
leaks that otherwise are too small for easy   nonfluorescent solid state where
detection or that exist only under stress.    fluorescence response is quenched to a
Pipelines, boilers, valves and other          high level of fluorescent brilliance. The
systems may also exhibit leakage only         technique of using liquid developers to
under conditions of pressure.                 enhance leakage indications obtained
                                              with water phase fluorescent tracers is
    Large leaks may be readily detectable     sensitive enough for detection of leaks
by a wetness that surrounds the points of     with submicroscopic cross sections.
leakage. Small leaks are more difficult to
localize because the water carrier may        Characteristics of Oil Phase
evaporate as it exudes from the leakage       Fluorescent Leak Tracers
point. Such small leaks will, of course,
carry out some of the tracer dye, causing a   The second important category of dyed
buildup of dry dye around the point of        liquid leak tracers is that of the so-called
leakage. In many cases, this accumulation     oil phase tracer. This type of leak tracer
of dye cannot be readily detected, because    uses as its vehicle or carrier a low viscosity
its fluorescence is quenched in the solid     solvent liquid, preferably an aromatic oil.
state. Virtually all of the useful water      The fluorescent dye or dyes used in such
soluble fluorescent dyes exhibit              tracers must be oil soluble in nature. Most
concentration quenching or solid state        of the available oil soluble sensitizer and
quenching of fluorescence, at least to        color former dyes are readily soluble in
some degree.                                  aromatic solvents, much more so than
                                              they are in aliphatic oils or distillates.
                                              Some of the most efficient fluorescent
                                              sensitizer dyes are oil soluble in character.
                                              An oil-and-solvent soluble coumarin dye
                                              is used in many liquid penetrant and leak
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tracer formulations; however, certain         that no films of the dyed liquid can
vehicle materials such as the silicones and   appear at the exit point of leakage. If the
fluorocarbons will not support                solvent liquid of the tracer system is
fluorescence with this coumarin type of       volatile, it will evaporate as it exudes from
oil phase fluorescent dye. Other              the leak outlet and a deposit of dry dye
proprietary dyes are available that require   will accumulate. This state is sometimes
little or no support for their fluorescence.  obtained only after a time longer than
                                              projected for the test. The length of time
Significance of Thin Film                     required for leak indications to form by
Fluorescence Response                         solvent evaporation will depend on the
Characteristics of Leak Tracers               size of the leak and the concentration of
                                              dye in the tracer liquid. Small leaks in
In cases where leaks are extremely small,     large tanks can be economically detected
the amount of dyed liquid tracer that can     by taking advantage of the evaporative
migrate through the leakage path is           leak tracer technique. Fairly low
correspondingly small. Detection of such      concentrations of dye can be used and it
small leaks often depends on the              is necessary only to allow sufficient time
fluorescence of extremely thin layers of      for an accumulation of dye to leak around
dyed liquid that form indications at each     a point of exit. In many cases, it may be
point of leakage. The visible color           necessary to use a solvent developer to
response, as well as the fluorescence         enhance water phase evaporative tracer
response of thin films of leaking dyed        leak indications, as described earlier.
liquids, follows the same laws as similar
films of color contrast or fluorescent        Limitations of Dyed Liquid
liquid penetrants. The tracer sensitivity     Tracers for Leak Detection
can be measured and calibrated as a           and Location
function of the concentration of the
indicator dye. The fluorescence response      Liquid tracers, generally analogous to
is about a linear function of the dye         liquid penetrant testing media, have
concentration. In some cases, it is even      several basic limitations in comparison
possible to estimate the dimensional          with gaseous leak tracers. In many cases,
magnitude of the leak through techniques      liquid cannot be introduced into the tank,
similar to those used in evaluation of        pipeline or component under test.
liquid penetrant testing.                     Vacuum chambers or vacuum pump
                                              systems fall into this category because
    The detectability of a given leak         liquid contamination and residues left
condition by dyed liquid tracers depends      after evaporation might serve as sources of
on at least two factors. First, the leakage   virtual leaks or cause outgassing, which
passageway must be large enough to            could be very hard to clean up from the
permit a visible amount of the dyed tracer    vacuum system. As noted earlier, liquids
liquid to pass through the leak during the    can act to clog leaks so that more
test. Second, the dye solution (its           sensitive gas tracers cannot pass through
brightness in thin films) must be             the leaks. Refrigeration systems or
dimensionally sensitive so that               equipment and air ducts may require leak
fluorescence or color response can be seen    testing without the use of liquids.
in the thin film exudation from the point
of leakage. It is obvious that a large            An obvious limitation results from the
leakage path cross section will permit a      similarity of liquid penetrant tracers and
greater flow of tracer liquid than would a    liquid leak tracers. Liquid penetrants can
small or restricted leakage path.             be applied to test surfaces, where they
Accordingly, when the detection of            enter surface connected discontinuities
extremely small leaks with liquid tracers is  such as cracks and porosity. After cleaning
desired, it is often necessary to use a dye   of excess penetrant from these surfaces,
tracer system that is characterized by a      the liquid penetrant tracer then exudes
high level of sensitivity. (This is not       from the discontinuities (which typically
always required, however, as explained        do not penetrate through the wall
below.)                                       thickness of the test material). Exudations
                                              and indications produced from
Evaporative Leak Tracers                      discontinuities that do not penetrate
to Detect Very Small Leaks                    through the wall or pressure boundary
                                              can form indications that are similar in
Sometimes microleaks are found in             appearance and characteristics to leakage
connection with surface porosity or other     indications formed by similar tracers.
conditions under which it is extremely
difficult to verify the leak condition.           Certain types of hermetically sealed
Where the leak is extremely minute, the       components, such as electronic devices,
rate of migration of the dyed liquid tracer   are often tested by applying pressurized
through the leakage path may be slow          tracer systems to their external surfaces (as
                                              in helium bombing) so that some tracer
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can enter the test part through any leak       powdered dye from a light yellowish
passageways. Later, the tracer can escape      green color to vivid purple. After testing,
from the interior volume and pass              the dye is removed with an air hose, by a
outward through the pressure boundary          water wash or by wiping the test surface
to form leakage indications.                   with a cloth. The concentration of
                                               ammonia gas can be as small as 50 µL of
    This technique is less feasible when       ammonia gas to 1 L of air (50 µL·L–1).
liquid tracers are used for leak testing. In   Problems encountered with this leak
most cases, the liquid would be an             testing technique are ensuring uniform
undesirable contaminant of the interior        adherence of the dye to the weld areas
regions of sealed test objects. Secondly,      and the complete removal of the dye after
the entry and later exudation of liquid        completion of the leak test.
tracer from leaks through the pressure
boundary cannot be reliably discriminated      Gas Phase Leak Testing
from surface indications that do not           with pH Sensitive Dye
penetrate the enclosure wall. Finally, as      Indicators
noted previously, exposure of test surfaces
to liquids that might seep into and clog       Various visible color and fluorescent dyes
leaks can result in severe difficulties if     are sensitive to the concentration of
later leak tests are conducted with gaseous    active ions, either acid or alkaline. These
tracers, because prior leak clogging with      ions determine the hydrogen potential (or
liquids can prevent the gas tracer from        pH), which indicates the ion content of
passing through the leaks.                     pure water. The pH value for a solution
                                               can be shifted by addition of an acid or
Techniques for Leak                            an alkali. A number of useful indicator
Location with Gas Phase                        dyes are quite sensitive to small changes
Dye Tracers                                    in pH of the liquid in which they are
                                               dissolved. While oxidation reduced
Gas phase tracers, used with dye               indicators are feasible, the most direct
indicators, have been developed to a high      way to use these effects is to use a pH
level of leak detection sensitivity. Either a  sensitive liquid and a tracer gas that will
visible color or a fluorescent dye can be      produce a change in pH of the liquid it
used to augment the sensitivity of a gas       contacts. This type of gas phase leak
phase leak tracer process. Detectors           indicator is a liquid material coated onto
consist of a dye and a tracer gas that will    areas suspected of having leaks. The
react with each other to produce a change      indicator material then reveals the
of color or fluorescence in the dye. A         presence of leaks by fluorescent or visible
simple technique of gas phase leak testing     color indications. A suitable indicator dye
with dye indicators is to pressurize the       for producing visible color leak
system to be tested with ammonia gas.          indications is phenolphthalein. However,
Note that ammonia gas is possibly              numerous proprietary dye indicators are
dangerous to use in leak testing unless it     available that yield satisfactory
is carefully controlled and exhausted from     fluorescence or color response as the
work areas to avoid injury to personnel.       result of very small changes in pH.
With ammonia gas as the leak tracer,
strips of pH indicator paper, moistened            Most of the pH sensitive dyes can be
with water, can be used as probes to           dissolved in pure water or in water and
search out any points of ammonia gas           alcohol mixtures. Glycols are effective as
leakage. This technique provides a             solvents for these dyes in many cases. In
medium-to-high leak test sensitivity for       formulating the dye indicators, sufficient
the detection of gas leaks but is awkward      acid (such as hydrochloric acid) or base
to use and ammonia fumes are unpleasant        (such as sodium hydroxide) is added to
or toxic for test operations.                  the dye solution to shift the pH to a value
                                               close to the color change point of the
Ammonia Gas Leak Detection with                indicator dye. The concentration of the
Purple Dye Indicators                          indicator dye may be varied within
                                               substantial limits. At the lower extreme,
Bromocresol purple dye is used in              changes of color or fluorescence may be
chemical reaction leak testing with            detected with dye concentrations as low
ammonia gas tracers. The dye is sprayed        as one part per million (1 µL·L–1) in the
or brushed onto the outside surfaces of        solvent. The practical upper limit is a
pressure vessel welds and allowed to dry.      saturated solution of the dye. The solvent
Upon drying, bromocresol purple turns          must be polar in nature so that it can
into a yellow chalklike powder coating.        ionize dissolved acids or bases. Examples
The vessel under test is then pressurized      of suitable solvents include various lower
with ammonia gas. If a leak exists, it is      alcohols, glycols, glycol ethers and water.
indicated by a change in the color of the      Alcohols and glycols are useful with water
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insoluble indicator dyes or where              the test surfaces where it dries to a pale
volatility or refractive index properties are  blue greaselike coating. Vapors of the
advantageous. It has also been found that      amine tracer that diffuse through leakage
the sensitivity of the leak detection          points act to trigger a color change in the
process can be greatly enhanced by             pasty coating so that bright red spots are
dissolving the indicator dye in a highly       formed to indicate leak locations.
purified, deionized water from which all
traces of buffer salt residues have been       Chemical Fumes Leak
removed. This allows the pH sensitive          Locator Techniques
tracer dye to switch easily from one color
or fluorescent state to another.               The chemical smoke or fumes leak
                                               indicator technique depends on a
Selection of Tracer Gas for Leak               chemical reaction between a tracer fluid
Testing with pH Sensitive Dye                  and a chemical reagent to produce visible
Indicators                                     leak indications. Various nonstandardized
                                               chemical indicator leak tests exist, of
Two basic materials are used in leak           which a few representative examples are
testing and location with the gas phase        described next. Tracer gases or vapors used
tracer and pH sensitive dye indicator: (1) a   in chemical indicator leak testing include
vapor source and (2) an indicator paint.       ammonia, hydrogen sulfide and carbon
Ammonia vapor could be used, of course,        dioxide. Both ammonia and hydrogen
but it represents a severe personnel           sulfide are considered hazardous or toxic
hazard. Proprietary gas phase tracers have     gases and should be used with proper
been developed that will yield a color         safety precautions. The chemical indicator
change in response to a very minute            techniques are static leak testing
quantity of vapors given off by simple         techniques used fundamentally as leak
amine liquids such as ethylene diamine or      location procedures. The longer the leak
propylenediamine. Many simple amines           test is run, the more sensitive it becomes.
have vapor pressures on the order of 1 kPa     A major advantage of these tests is their
(10 torr) at room temperature. In normal       relatively low cost because no expensive
use, the vapor concentration of such           instrumentation is required. Major
tracers cannot exceed 10 parts in 760 (the     limitations of these tests include the
partial pressure ratio) or about 1.3           possibility that reactive chemicals might
percent. Even this concentration would         damage materials or parts of systems
normally occur only quite close to the         being tested or present hazards to
work area or within a pressure chamber.        personnel.
Thus, for low vapor pressure amines, the
hazard to leak testing personnel may be        Chemical Indicator Leak Detector
considered to be negligible. During leak       Techniques Using Ammonia Tracer
testing, the vapor source may be placed        Gas
inside the test chamber or system, either
in a shallow cup or on a cloth pad or          Ammonia (NH3) gas has found industrial
sponge. Even without pressurization of         use as a gas phase leak tracer. It is
the chamber, the vapors from the amine         chemically basic and corrosive and it is
liquid may often diffuse through               usually prohibited at concentrations
extremely small microleaks, pinholes,          exceeding 75 µL·L–1. The corrosive action
porosities in seals, welds and brazed          of ammonia is exhibited strongly on brass
joints. Of course, a small amount of           parts. The ammonia tracer can be
pressurization will act to accelerate the      introduced as an anhydrous ammonia gas
leakage of the vapors.                         or by placing a cloth saturated with liquid
                                               ammonia in the pressurized space. The
Formulation of pH Sensitive                    sensitivity of the leak tests will depend on
Indicator Paints for Coating Test              the concentration of the ammonia gas
Surfaces                                       and will increase with higher
                                               concentrations. Hydrogen chloride vapor
The indicator paint used to indicate leak      can be introduced by probing the
locations must contain a suitable              atmosphere in the vicinity of a leak with
indicator dye. The unbuffered pH of the        an open bottle of hydrochloric acid or
dye solution must be carefully adjusted to     with a swab wetted with 0.1 normal
a point just below the critical pH of          hydrochloric acid. (Note that
fluorescence or color change. Also, a          hydrochloric acid is a dangerous chemical
thickening agent and an evaporative            and should not be brought into contact
dilutent should be included so that a          with the skin or eyes or inhaled through
paint coating that is applied to a test        nose or mouth.) Where leaks are present,
surface will become partially dry and form     the leakage of ammonia tracer gas can be
a greasy or pasty coating on the test          revealed by a white chemical fog or mist
surface. A typical proprietary leak tracer     of ammonium chloride that forms when
paint is a liquid that can be brushed onto
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the ammonia comes into contact with the        Formulation of Agar-Agar Film
hydrogen chloride vapor. This technique        Solution Sensitive to Carbon
should be used only with good ventilation      Dioxide Tracer Gas
because of the obnoxious characteristics
of both hydrogen chloride vapor and            The spray solution sensitive to leaking
ammonia gas.                                   carbon dioxide tracer gas is formulated
                                               (by weight) of 1.0 part of agar-agar to 0.15
    Another technique for use of ammonia       part of phenolphthalein. It is important
in a chemical indicator leak test is to use    to obtain the proper viscosity of agar-agar
sulfur dioxide (SO2), as from a sulfur         solution, which should be between 0.5
candle, as the revealing reactant.             and 1 mPa·s (5 and 10 atm) at the
Ammonia combines with sulfur dioxide           spraying temperature, about 65 to 70 °C
gas to produce a white mist of                 (149 to 158 °F). To prepare the spray
ammonium sulfide. Sulfur dioxide is not        solution, the dry powders of agar-agar,
quite so irritating or corrosive as            sodium carbonate and phenolphthalein
hydrogen chloride; however, sulfur             should be blended thoroughly in proper
dioxide is still an obnoxious gas and          proportions. The dry mixed powders
should be used only in well ventilated test    should be added to cool distilled water
areas.                                         while stirring to disperse the solid
                                               constituents. The resulting mixture should
    A third gas that can be used as a          be stirred constantly while heating to
revealing reactant for leaking ammonia         temperatures between 96 and 98 °C (205
vapor is carbon dioxide (CO2). Carbon          to 208 °F), either on a hot plate or with a
dioxide is not as sensitive as either          steam bath. When the solids have
hydrogen chloride or sulfur dioxide when       dissolved completely and a clear solution
used for leak location with ammonia            has been obtained, it should be allowed to
tracer gas but has the advantage of being      cool to a temperature between 65 and
noncorrosive.                                  70 °C (149 to 158 °F). At this storage
                                               temperature, the indicator film solution
Chemical Indicator Leak                        can be stored in a closed glass container
Detector Techniques Using                      sealed to exclude air and the small
Carbon Dioxide Tracer Gas                      quantities of carbon dioxide in the
                                               atmosphere.
Another chemical indicator leak location
technique uses carbon dioxide tracer gas       Miscellaneous Additional
to fill the vessel or system under test. The   Leak Detector Techniques
leak indicator consists of agar-agar           Using Chemical Indicators
solution loaded with sodium carbonate
and phenolphthalein. This bright red           Numerous additional techniques of leak
spray solution yields a stable red film        testing using chemical indicators of
when sprayed onto test surfaces. Leaking       leaking tracer gases of liquids have been
carbon dioxide causes the formation of         proposed and used on occasion. Several of
white spots at points of leakage. The          the following examples involve use of
volume of red agar-agar film that is           hazardous tracer gases such as hydrogen
changed to a white color is directly           sulfide or acetylene and should be
proportional to the amount of leaking          avoided where feasible. Hydrogen sulfide
carbon dioxide that enters the indicator       has been used as a tracer gas to locate
film. To apply this indicator film, the        leaks in containers. The indicator solution
agar-agar solution is preheated and stored     responsive to hydrogen sulfide is a five
at temperatures of 65 to 70 °C (149 to         percent solution of stannous chloride. The
158 °F), at which temperature the agar is      leak locations are then shown by brown
liquid. For application to test surfaces, the  stains of stannous sulfide. Because of the
hot agar solution is poured into a             poisonous nature of hydrogen sulfide, this
preheated sprayer bottle and sprayed with      is not a very popular leak testing
preheated compressed air. The spray            technique. An alternative chemical that
nozzle should be held about 0.6 m (2 ft)       responds to hydrogen sulfide by the
from the test surface. A single coating        formation of precipitates consists of
should be applied in one pass and              indicator solutions containing silver salts
multiple coatings should be avoided.           or lead salts.
Spraying should always be done in a
horizontal direction, never vertically. After      Leaks in natural gas pipelines have
completion of leak testing, the agar-agar      been located by the reactions of silver salt
film can be removed by a jet of high           solutions with acetylene tracer gas.
velocity air. The air jet will lift the agar   Acetylene is also a hazardous gas that
film from the test surface, leaving the        explodes spontaneously at pressures above
surface in a clean, dry condition.             200 kPa (30 lbf·in–2). Acetylene forms
                                               explosive mixtures with air or oxygen in
                                               almost any proportions.
586 Leak Testing
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Anhydrous copper sulfate has been         and placing it inside the vessel to be
used as a chemical leak indicator where       tested. All openings in the test system
water is used as the tracer fluid (as in      should then be closed. Almost
detection of leaks from water lines or        immediately, smoke will be seen issuing
water leaking during hydrostatic tests).      from the larger leaks present in the test
When leaking water contacts a developer       object. The order of escaping smoke will
film of anhydrous copper sulfate, it shows    also assist in pinpointing the locations of
blue indications at locations of water        leak exits. When smoke tests are made on
leakage. An alternative technique of          steam generating boilers and similar
indicating water leakage is a lime wash or    equipment with volumes of 2.8 × 103 m3
similar type of coating applied over          (105 ft3) or larger, it is frequently desirable
external surfaces of test vessels or test     to apply air pressure to the interior
systems within 24 h after hydrostatic         volume of the system under test.
pressure testing.
                                                  Smoke candles can be obtained that
    Typically, only large leaks such as       provide from 100 m3 (4 × 103 ft3) of
centerline cracks or pinholes can be          smoke in 30 s to 4 × 103 m3 (1.4 × 105 ft3)
indicated by this technique. Fine check       of smoke in 2 or 3 min. The color of the
cracks may not be indicated when water        smoke may vary from white to gray,
under pressure is used as a tracer.           depending on the smoke density and
Sometimes nearly penetrating                  available lighting. The smoke used in leak
discontinuities may enlarge sufficiently      location is generated by chemical
under hydrostatic pressure to seep water.     reaction, contains no explosive materials
This water seepage will produce wetness       and has been assumed to be nontoxic.
indications in the lime wash indicator,
but interpretation of these indications
may be difficult.
Fluorescent or Visible                        FIGURE 2. Smoke generators: (a) titanium
Tracer Dyes in Hydrostatic                    tetrachloride smoke stick; (b) dye based
Test Fluids                                   smoke candles.
                                              (a)
Fluorescing dye indicators can be added to
the pressurized liquid (usually water) used   (b)
in hydrostatic pressure tests. The dye may
provide bulk fluorescence or can more
appropriately be of the type that provides
intensified fluorescence after evaporation
of the carrier liquid. In some cases, a
developing fluid or film may be applied to
the external surfaces of the test object
where leakage is possible or suspected.
During or following hydrostatic pressure
tests (which often serve as proof tests
simulating application of service stresses),
the test operator can visually examine all
welds under strong white light (if visible
color dyes were used) or under near
ultraviolet radiation (if fluorescent dyes
have been used in the pressurizing fluid).
Slow, continuing seepage from small leaks
thus can be indicated by brilliant
fluorescent indications.
Smoke Bomb Techniques
for Locating Leaks
Gas and smoke bombs (Fig. 2) can be used
for detecting and locating leaks. Generally
speaking, a volume of smoke sufficient to
fill a volume five or six times larger than
the volume of the vessel or system to be
tested is required for a smoke test.
Medium size volumes such as pressure
vessels can be tested by closing all vents,
igniting a smoke candle or smoke bomb
                                                                                                 Leak Testing Techniques for Special Applications 587
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