Chemical Sharing session _18 Apr 2022

CHEMICALS MGMT. & PROCESS CONTROL FOR
PURCHASER, RECEIVER, SUPERVISOR , MAIN

CONTRACTOR AND MANAGER

Ts. NASIR SENIN
HEALTH SAFETY & ENVIRONMENT

18-4-2022

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Attendance

Name Email Department Attendance
(Yes / No)
STD
Shafii Ismail [email protected] QA
Mohd Radzuan Tumiran [email protected]

Mohd Zahrin Abdul Wahab [email protected] Equipment /SEART

Abu Mohammed Zin [email protected] STD

Khayrularifin Abu Talib [email protected] STD

Harnisah Tajudin [email protected] QA
Sharaifah Kamariah Wan [email protected] STD
Sabli
Nurisyam Samsudin [email protected] Finance

Ahmad Akashah Mohd Ali [email protected] QA

Zakinah Yaakob [email protected] In-BCS
Tunku Fadzley Tunku [email protected] Facilities MIMOS
Hanizar
Shazali Mohd Yunus [email protected] Facilities MIMOS

Ahmad Tarmizi [email protected] UDA Dayaurus

Nik Mohd Razali Mohd Nor [email protected] STD

Nur Azera Tuhaime [email protected] Wireless Comm & sensor
tech
Nora'zah Abdul Rashid [email protected] Wireless Comm & sensor AWN- Husband Pass
tech away
Facilities MSSB
Norsiah Makujod [email protected]

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HSEMS & PURPOSE

The aim is to protect employees and non-employees who are within the premise 3
from any hazards and its associated risks, to eliminate risk of work-related injuries,
disabilities, ill health, diseases, near misses and fatalities. Aside to safety and health,
MIMOS as a responsible organization should aim to also protect the surrounding
environment (land, air, water) wherever MIMOS operates in.

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HSEMS POLICY 4

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CHEMICAL SAFETY LEGISLATION IN MALAYSIA 5

Register and Control of Chemical Hazardous to Health
OSH(Use & Standard of Exposure of Chemicals Hazardous to Health)
Regulation 2000 – USECHH

• Chemical Register to be kept at the workplace

Inventory of Hazardous Chemicals
OSH (Classification, Labelling and Safety Data Sheet of Hazardous
Chemicals regulation 2013

• Chemical information Management System (CIMS)

Prevention of Major Chemical Accident
OSH (Control Major Hazards) Regulation 1996 – CIMAH

Notification of Chemical Accident
OSH (Notification of accident, Dangerous Occurrence, Occupational
Poisoning and Disease) regulation 2004 – NODOPOD

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2. Use and Standard of Exposure of Chemicals
Hazardous to Health (USECHH) Regulations 2000

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CHEMICAL MANAGEMENT CYCLE- CRADLE TO GRAVE

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LEGAL REQUIREMENT • Chemical Hazardous to Health (CHH)

• USECHH 2000 • Storage – compatibility / reactivity
• NADOPOD 2004 • Transfer – suitable container
• CIMAH 1996 • Relabeling – as per legal requirement
• CIMS • Notification of incident/

• Road Safety Act chemical poisoning

• Delivery and receiving • EQ (SW) 2005
• Loading / unloading
• Control of exposure • Schedule
Waste

• Reuse / Recycle

• CLASS 2013 • Classification

• Labelling
• SDS

• Packaging

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9 Classes of Dangerous Goods 9

•Class 1: Explosives
•Class 2: Gases
•Class 3: Flammable liquids
•Class 4: Flammable solids
•Class 5: Oxidizing agents & organic peroxides
•Class 6: Poisoning, Toxins and infectious substances
•Class 7: Radioactive material
•Class 8: Corrosives
•Class 9: Miscellaneous dangerous goods

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SDS - Worldwide standard comparison

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WHY ARE SAFETY DATA SHEET (SDS) IMPORTANT : SOLVENT (Sample)

Solvents are used in wafer fabrication process
particularly in etching, photoresist, developer and
rinse. Such solvent includes:-

FLAMMABLE

HEALTH
HAZARD

WHY ARE SAFETY DATA SHEET (SDS) IMPORTANT:

Product Hazard Composition of First aid measures
identification identification information

Fire-fighting Accidental release Handling and Exposure
measures measures storage controls/personal

Physical and Stability and Toxicological protection
chemical reactivity information Ecological
properties information
Transport Regulatory
Disposal information information Other information
considerations

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LIST OF CHEMICALS HAZARDOUS TO HEALTH

To be filled in by coordinator and form already shared in office.com

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HAZARD IDENTIFICATION RISK ASSESSMENT RISK CONTROL

Process Hazards Risk Risk Control

1. Wafer Preparation • Acids • Chemical vapors • Enclosures
• Solvents • LEV
from cleaning

2. Oxidation • Gases • Toxic • Enclosures
• Silane • Phyroporic Gas • LEV

release

3. Photo masking & • Solvents • Solvent content in • Automation to
Etching
• Acids resist, 80% of limit solvent

• Alkalis mixture (xylene, n- exposure below

• Photoresist butyl acetate, 2- TLV

• Developers ethoxythel acetate • Enclosures

• UV Light • RF TLV 4.9mW/cm2,

• RF radiation RF leak through

misaligned door

4. Doping : Diffusion • Gases • Highly toxic dopant • LEV
and Ion Implantation • Dopants
gases (arsenic, • Respirators
• Metals
• Radiation diborane, during furnace

phosphine) maintenance

• X ray radiation • Periodic radiation

leakage surveys

HAZARD IDENTIFICATION RISK ASSESSMENT RISK CONTROL

Process Hazards Risk Risk Control

5. Chemical Vapor • Gases • Highly toxic gas • Enclosures
Deposition (CVD) • Dopants release • LEV
• Respirators during

maintenance

6. Metallisation • Dopants • Solvent exposure • Enclosures
• Metal
• Solvents during maintenance/ • LEV

cleaning • Respirators during

• RF radiation leak from maintenance

sputtering process • Wire mesh/copper

tape to control RF

leak

7. Passivation • Silicon Oxides • Highly toxic gas release • Enclosures
• Nitrides • LEV
• Alum Oxide

PERSONAL PROTECTIVE EQUIPMENT (PPE)

Safety Safety Face Ear Apron/ Hard Respirat
or
Boots Gloves Glasses Shield Muff Coverall hat

WORK AREAS/ • PPE is the final
FUNCTIONS mode of
protection in
Facility, Labs –       case all the
other control
Chem & Gas measures failed.

Facility – Mech &

   Elect

Equip   

Maintenance

Warehouse  

 Required PPE

STORAGE REQUIREMENT

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WARNING SIGNS 18

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CHEMICAL INCOMPATIBALITY CHART

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CHEMICALS PURCHASE PROCEDURE

Receiving pastikan pematuhan:- • SDS hardcopy => SDS Fail berdekatan tempat kerja
• Labelling Std • SDS softcopy => 2022 SDS folder*
• SDS ada, < 5 tahun • Kemaskini Daftar Bahan Kimia (Chem Register) = 2022 SDS folder*
• Maklum kpd Procurement • Kaedah selamat penggunaan bahan kimia, hazad, PPE, kaedah

jika supplier tidak patuhi simpanan dan pembuangan di semak oleh pembeli dan di maklum

kepada pengguna bahan kimia

Rujuk SOP Pelupusan bahan
kimia berjadual

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rights reserved.

CHEMICAL MANAGEMENT POLICY

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Chemical Accident in Malaysia : HSE Investigation

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Iceberg theory in accident 23

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[email protected]

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